Miniature methane sensor and methane detection method

A methane sensor, methane detection technology, applied in the direction of material resistance, can solve the problems of poor consistency, complex circuit, power consumption, etc., to achieve the effect of improving anti-interference performance, enriching sensing signals, and good long-term stability

Active Publication Date: 2019-01-18
CHINA UNIV OF MINING & TECH
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Problems solved by technology

This requires an additional circuit to provide the required current, and the circuit is complex; it needs to consume a certain amount of power to provide current excitation
Moreover, due to the differences between different measurement components, different voltages will be generated when the same current is applied, which is poor in consistency, inconvenient for measurement, and inconvenient for batch calibration
In addition, its heating element is not conducive to applying AC signals. Even if an AC heating signal is applied, the rich AC sensing signals such as frequency, phase, and amplitude cannot be directly measured on the measuring element.

Method used

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Embodiment Construction

[0031] An embodiment of the present invention will be further described below in conjunction with accompanying drawing:

[0032] Such as figure 1 As shown, the miniature methane sensor of the present invention includes a support 100, a heating element 101 and one or more mutually independent measuring elements 102;

[0033] The support 100 includes a substrate 11 and an isolation silicon oxide layer 12 disposed on the substrate 11, and a single crystal silicon layer 13 is disposed above the isolation silicon oxide layer 12;

[0034]The heating element 101 and each measuring element 102 include a U-shaped cantilever arranged side by side on the support 100 and two fixed ends 1001; the fixed end 1001 of the heating element 101 is independent of the fixed end 1001 of the measuring element 102 The heating element 101 and the measuring element 102 are set on the support 100 through their respective two fixed ends 1001, and the U-shaped cantilever I 1012 of the heating element 101 ...

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Abstract

A miniature methane sensor and a methane detection method are suitable for methane detection and are further suitable for methane detection of underground coal mine. The methane sensor comprises a heating component and one or more of measurement components, wherein the heating component is separately heated to a high-temperature working state, and the measurement component independent to the heating component does not apply an external current or voltage and is used for directly measuring the voltage so as to detect gas concentration. A methane sensor processing technology is compatible with aCMOS process. The methane sensor has the advantages of simple structure, low power consumption, high sensitivity, good interference resistance and low cost.

Description

technical field [0001] The invention relates to a miniature methane sensor and a methane detection method, in particular to a miniature methane sensor and a methane detection method suitable for underground use in coal mines. Background technique [0002] The inventor previously proposed a micro methane sensor based on a single heating element and its preparation method (ZL201410605995.4), the measuring element needs to apply a current when it is working, and then the voltage on the measuring element can be detected to detect methane and its concentration. This requires an additional circuit to provide the required current, and the circuit is complex; it needs to consume a certain amount of power to provide current excitation. Moreover, due to the differences between different measuring components, different voltages will be generated when the same current is applied, and the consistency is poor, which is inconvenient for measurement and batch calibration. In addition, its ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/14
CPCG01N27/14
Inventor 马洪宇孔祥林陈鹏杜亚娜丁恩杰赵小虎王刚
Owner CHINA UNIV OF MINING & TECH
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