A measuring device of nano -level capacitor displacement sensor based on flexible hinge mechanism
A technology of displacement sensor and flexible hinge, which is applied in the field of sensors, can solve the problems of inconvenient assembly and adjustment, complicated device, insufficient stroke, etc., and achieve the effect of reducing the influence of external factors, improving the accuracy of adjustment, and increasing the accuracy
Active Publication Date: 2020-12-01
SANYING MOTIONCONTORL TIANJIN INSTR CO LTD +1
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Problems solved by technology
[0004] To calibrate the nano-displacement capacitive sensor, special customized tooling is required, and the size and stability of the tooling stroke will affect the final index of the nano-displacement capacitive sensor. The existing technology is not suitable for the measurement of the nano-scale displacement capacitive sensor, and the device is complicated. Unable to meet the connection of various types of nano-displacement capacitive sensors, or insufficient travel, or large volume, occupying more holes, or inconvenient assembly and adjustment, etc.
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Embodiment Construction
[0020] Embodiments of the present application will be described in detail below with reference to the drawings and examples.
[0021] Such as Figure 1-Figure 2 As shown, the present invention provides a nanoscale capacitive displacement sensor 7 measuring device based on a flexible hinge mechanism, including a linear motor 1, a motor bracket 2, a main body connection plate 4, and a platform body 3 fixed on the main body connection plate 4 , the linear motor 1 is fixed on the main body connection plate 4 through the motor bracket 2, the platform main body 3 is driven by the linear motor 1, and the use of the linear motor 1 can ensure the uniform linear motion of the motion mechanism.
[0022] A groove is arranged in the middle of the platform main body 3, and a boss 8 is arranged in the middle of the groove. One end of the boss 8 abuts against the inner wall of one end of the platform main body 3, and the other end is separated from the inner wall of the other end of the platf...
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The invention provides a nanoscale capacitive displacement sensor measuring device based on a flexible hinge mechanism. The nanoscale capacitive displacement sensor measuring device comprises a linearmotor, a motor bracket, a main body connecting plate and a platform body fixed to the main body connecting plate, wherein a flexible hinge mechanism is arranged inside the platform main body; the linear motor is fixed to the main body connecting plate through the motor bracket; the platform main body is drive to rotate by the linear motor; a nano displacement sensor mounting plate is vertically mounted on the top surface of the platform main body near one side of the linear motor; a nano displacement sensor is mounted on the nano displacement sensor mounting plate; and a motion plate is fixedto a boss. The nanoscale capacitive displacement sensor measuring device has a compact structure, can test the travel of a nanoscale displacement capacitive sensor, and has high test stability. A surface under detection can move at a relatively small pitch angle and yaw angle, thereby ensuring the accuracy of the detection value of the nanoscale displacement capacitive sensor.
Description
technical field [0001] The present application relates to the field of sensor technology, in particular to a nanoscale capacitive displacement sensor measuring device based on a flexible hinge mechanism. Background technique [0002] With the mature development of sensor technology, sensors have been widely used in various measuring devices. Displacement sensors are an integral part of many geometric quantity measuring devices. [0003] Capacitive displacement sensor, that is, the object to be measured and the sensor are each used as a flat plate electrode. By giving the sensor a continuous and stable AC signal, the amplitude change of its voltage is proportional to the distance between the sensor and the measured object. After the AC signal is demodulated, the displacement can be measured. The capacitive displacement sensor has the characteristics of large signal-to-noise ratio, high sensitivity, wide frequency response, small nonlinearity, good precision stability, and ...
Claims
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IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 须颖贾静肖书文
Owner SANYING MOTIONCONTORL TIANJIN INSTR CO LTD