Thickness measurement method, device and system of movable electrode of electrostatic transducer

Abstract

The invention relates to a thickness measurement method, device and system of a movable electrode of an electrostatic transducer. The method includes: obtaining electrode spacing of the electrostatictransducer at all deformation moments and corresponding currents between electrodes, wherein the deformation moments are moments in a deformation process of the movable electrode of the electrostatictransducer under bias voltage; fitting a linear relationship, which is obtained according to all the electrode spacing and all the currents between the electrodes, to obtain a fitting relationship, and obtaining an error function of the fitting relationship; and obtaining thickness of the movable electrode of the electrostatic transducer according to a minimum value of the error function. Throughthe method of the application, the corresponding linear relationship is established on the electrode spacing and the currents between the electrodes in the deformation process of the movable electrodeof the electrostatic transducer after loading of the bias voltage, an error of the linear relationship is analyzed, and the thickness of the movable electrode can be obtained when the error of the linear relationship is minimized, errors caused by traditional technology directly using instrument measurement are avoided, and accuracy of obtaining the thickness of the movable electrode is improved.

Description

technical field [0001] The present application relates to the technical field of micro-electro-mechanical systems, in particular to a method, device and system for measuring the thickness of a movable electrode of an electrostatic transducer. Background technique [0002] An electrostatic transducer is a capacitor made of two conductors that can store opposite charges. According to function, electrostatic transducers can be divided into sensors and actuators. In the field of MEMS (Micro Electro Mechanical Systems, microelectromechanical systems), because many devices usually have a large surface area / volume ratio and very small mass, electrostatic force has become a common driving method in MEMS, so that electrostatic transducers widely used in this field. Among them, common electrostatic MEMS devices include RF (Radio Frequency, passive devices) MEMS switches, MEMS micromirrors, MEMS inertial devices, and the like. [0003] During the working process of the electrostatic...

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Problems solved by technology

However, due to the imperfection of processing and manufacturing technology, there are micro-protrusions on the electrode surface of the electrostatic transducer, which leads to the amplification effect of the electric field near the micro-protrusion. The performance of the transducer plays a vital role in

[0004] However, during the implementation process, the inventors found that there are at least the following problems in the traditional technology: the traditional measurement technology cannot accurately measure the thickness of the movable electrode of the electrostatic transducer, resulting in the inability to objectively analyze the performance of the electrostatic transducer

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