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Wind speed sensor based on double-layer lens structure

A technology of wind speed sensor and double-layer lens, which is applied in instrumentation, fluid speed measurement, speed/acceleration/shock measurement, etc. It can solve the problems of bulky, high cost and unsatisfactory, and achieve fast response, low power and light structure Effect

Active Publication Date: 2019-11-22
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to address the deficiencies of the above-mentioned background technology, provide a wind speed sensor based on a double-layer lens structure, realize the wind speed measurement based on the Bernoulli effect and optical principles, and solve the problems caused by the existing wind speed sensor due to its large size and high cost. Technical problems that cannot meet the application requirements of miniaturization and low power consumption in Internet of Things technology

Method used

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  • Wind speed sensor based on double-layer lens structure
  • Wind speed sensor based on double-layer lens structure

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Embodiment Construction

[0017] The technical solution of the invention will be described in detail below in conjunction with the accompanying drawings.

[0018] The wind speed sensor disclosed in this application is as figure 1 and figure 2 As shown, it includes three parts: the upper flexible lens 1 , the lower fixed lens 2 and the silicon substrate 3 , and an air cavity is formed between the upper flexible lens 1 and the lower fixed lens 2 to communicate with the outside world. The wind speed sensor disclosed in this application can also realize the double-layer lens structure of the upper layer flexible lens and the lower layer fixed lens through the separation device, and its working principle and detection method are the same as the upper layer lens structure prepared on the same silicon substrate.

[0019] When the wind speed sensor is actually working, a wide-wavelength light wave is vertically incident above the upper flexible lens, and the wavelength of the reflected light wave is measured...

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Abstract

A wind speed sensor based on a dual layer lens structure, being a dual layer lens structure composed of a flexible lens (1) and a fixed lens (2) on a silicon substrate (3), a sufficient air cavity being left between the flexible lens (1) and the fixed lens (2) on the silicon substrate (3); when wind flows past, on the basis of Bernoulli's principle, the flexible lens (1) moves toward the fixed lens (2) and a wide wavelength light wave is vertically irradiated from above the flexible lens, such that the magnitude of the wind speed can be measured on the basis of the wavelength of the reflected wave. The wind speed sensor based on a dual layer lens structure implements non-invasive measurement, does not require wiring, and can reduce the power consumption of the sensor.

Description

technical field [0001] The invention discloses a wind speed sensor based on a double-layer lens structure, relates to MEMS devices, and belongs to the technical field of measurement and testing. Background technique [0002] Wind speed measurement involves all aspects of people's lives, such as industrial construction, agricultural production, aerospace, transportation and tourism, weather forecast and environmental protection. In the early days, the measurement of wind speed was mainly realized by mechanical wind cups and wind vanes. In recent years, wind speed sensors based on ultrasonic and Doppler principles have appeared. However, it cannot meet the application requirements such as miniaturization and low power consumption in the Internet of Things technology. [0003] Neil Bernoulli proposed "Bernoulli's principle" in 1726, which was the basic principle used in hydraulics before the establishment of the continuum theoretical equation of fluid mechanics. Its essence is...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P5/26
CPCG01P5/26
Inventor 易真翔
Owner SOUTHEAST UNIV