Prototype of sapphire ultra-high temperature pressure sensor and its preparation method

Abstract

The invention discloses a prototype of a sapphire ultra-high temperature pressure sensor. The prototype of the sapphire ultra-high temperature pressure sensor comprises a sapphire passive high-temperature-resistant voltage-sensitive element, a long-distance wireless transmission module and a characteristic signal wireless reading and storing module, wherein an anti-thermal impact plate is arrangedat one end of the outer side of the pressure sensor prototype, and a heat dissipation plate is installed at the other end of the pressure sensor prototype; the sapphire passive high-temperature-resistant voltage-sensitive element is installed on one side inside the pressure sensor prototype; the sapphire passive high-temperature-resistant voltage-sensitive element is composed of a high-temperature-resistant sensitive capacitor and a high-temperature wireless transmission inductance coil; a high-temperature-resistant thermal insulation material layer is arranged between the passive high-temperature-resistant pressure-sensitive element and the long-distance wireless transmission module; and a high-temperature-resistant test antenna is installed in the characteristic signal wireless readingand storing module. The passive high-temperature-resistant pressure-sensitive module of the sensor prototype can work at a super-high temperature environment of 1,200 DEG C or above, and the wirelessreading and storing module works in a high-temperature environment so as to realize in-situ testing of the characteristic signals in the ultra-high-temperature environment.

Description

technical field [0001] The invention relates to the field of sensor prototypes, in particular to a sapphire ultra-high temperature pressure sensor prototype and a preparation method thereof. Background technique [0002] With the continuous development of the performance of large-scale equipment such as advanced aero-engines and gas turbines, the requirements for the monitoring and testing capabilities of working parts in ultra-high temperature environments are increasing. Among them, the testing of pressure parameters in ultra-high temperature environments above 1200 ° C has gradually become a constraint for these large-scale equipment. The key technology "bottleneck" of manufacturing. Existing high-temperature pressure sensors are mainly based on materials such as silicon, SOI, silicon carbide, and ceramics. The signal is read mainly through electrical leads. The material properties of the sensor and the signal reading method limit its working temperature range and cannot ...

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Problems solved by technology

Existing high-temperature pressure sensors are mainly based on materials such as silicon, SOI, silicon carbide, and ceramics. The signal is read mainly through electrical leads. The material properties of the sensor and the signal reading method limit its working temperature range and cannot be used for a long time. Stable realization of in-situ dynamic testing of pressure parameters in ultra-high temperature environments above 1200°C, compared with the application of high-temperature and harsh environments in the manufacture of large-scale equipment such as advanced engines and gas turbines, there is still a big gap

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