High-entropy alloy film and preparation method thereof

Abstract

The invention discloses a CoCrFeNiAl 0.3 high-entropy alloy film and a preparation method thereof. The preparation method of the CoCrFeNiAl 0.3 high-entropy alloy film comprises the steps that a to-be-treated sample silicon substrate is cleaned, and the cleaned sample substrate is placed on a substrate heating device of pulse laser deposition equipment; a high-entropy alloy target is fixed to a target rotating motor of the pulse laser deposition equipment; a vacuum chamber of the pulse laser deposition equipment is vacuumized, so that the vacuum degree of the vacuum chamber reaches a preset vacuum value; film-plating experimental parameters of the pulse laser deposition equipment are set, and pulse laser pre-sputtering is conducted on the sample substrate; and the sample substrate is plated with the high-entropy alloy film according to the film-plating experimental parameters. By adoption of the CoCrFeNiAl 0.3 high-entropy alloy film and the preparation method thereof, the film preparation process is simplified, and the industrial application cost of high-entropy alloy is reduced; and meanwhile, the uniform-element high-entropy alloy film can be conveniently prepared on the surfaceof a complex-structure part, so that the strength, wear resistance and hardness of the part are improved, and the service life of the part is prolonged.

Description

technical field [0001] The invention relates to the technical field of new material preparation, in particular to a CoCrFeNiAl 0.3 High entropy alloy thin film material and its preparation method. Background technique [0002] In recent years, high-entropy alloys have become one of the new hotspots in the study of metal materials. Usually, high-entropy alloys are alloys formed by five or more metal elements in close to equiatomic ratios. They have good high temperature resistance, corrosion resistance, Excellent properties such as high strength and high toughness. At present, the preparation and research of high-entropy alloys are concentrated on bulk structural materials. Due to the large number of components of high-entropy alloy materials, the cost of industrial use is relatively high. On the other hand, due to the high hardness and strength of high-entropy alloy materials , making its processing and forming more difficult, especially in the application of some parts wi...

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Problems solved by technology

At present, the preparation and research of high-entropy alloys are concentrated on bulk structural materials. Due to the large number of components of high-entropy alloy materials, the cost of industrial use is relatively high. On the other hand, due to the high hardness and strength of high-entropy alloy materials , making its processing and forming more difficult, especially in some parts with complex structures, the application is obviously limited

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