Furnace door body structure for diffusion furnace

A technology of diffusion furnace and furnace door, which is applied to furnaces, furnace components, lighting and heating equipment, etc., can solve the problems of complex structure of boat feeding mechanism and low production efficiency, and achieve simple structure, improve production efficiency and reduce occupied space. Effect

Pending Publication Date: 2019-02-22
无锡松煜科技有限公司
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  • Abstract
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In the existing diffusion furnaces on the market, the furnace door is generally integrated with the boat feeding mechanism. The boat feeding mechanism has a complicated structure. The forward-forward approach leads to low production efficiency

Method used

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  • Furnace door body structure for diffusion furnace
  • Furnace door body structure for diffusion furnace
  • Furnace door body structure for diffusion furnace

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Embodiment Construction

[0023] combine Figure 1 to Figure 4 , which describes a specific embodiment of the present invention in detail, but does not limit the claims of the present invention in any way.

[0024] Such as Figure 1 to Figure 4 As shown, a furnace door structure for a diffusion furnace, a furnace door body 1 and a furnace door driving mechanism 2;

[0025] The furnace door body 1 includes a furnace door support plate 101, a furnace door support shaft 102, a limit rotating shaft 103, a radial joint bearing 104, an aluminum door 105, a connecting plate 106 and a quartz door 107. The center of the furnace door support plate 101 is connected with Furnace door support shaft 102 is fixed with one side of aluminum door 105 by bolts around, and the center of one side of aluminum door 105 is equipped with radial joint bearing 104, and the other side is connected with one side of connecting plate 106 by spring bolt 110, and the other side of connecting plate 106 One side is connected with the ...

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PUM

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Abstract

The invention relates to the technical field of semiconductor processing equipment, in particular to a furnace door body structure for a diffusion furnace. The furnace door body structure comprises afurnace door body and a furnace door driving mechanism. The furnace door body comprises a door supporting plate, a furnace door supporting shaft, a limiting rotary shaft, a radial knuckle bearing, analuminum door, a connecting plate and a quartz door. The furnace door driving mechanism comprises a bottom plate, two sliding bar assemblies, a supporting plate, a rodless cylinder, a sliding rail assembly, a furnace door connecting rod, a first cylinder, a second cylinder, a first cylinder connecting block, a second cylinder connecting block, a first limiting block, two first limiting switches, asecond limiting block and two second limiting switches. The furnace door structure body structure provided by the invention is simple in structure and good in sealing performance. The furnace door driving mechanism is smaller in occupied space and accurate in travel control. When the diffusion furnace adopts the furnace door body structure, the sealing performance of the furnace door body can meet the process requirements. The furnace door body as a whole does not need to be integrated with a boat feeding mechanism and is convenient to install and maintain, and the production efficiency is greatly improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing equipment, in particular to a furnace door structure for a diffusion furnace. Background technique [0002] In the existing diffusion furnaces on the market, the furnace door is generally integrated with the boat feeding mechanism. The boat feeding mechanism has a complex structure. When installing or disassembling the quartz tube, the boat feeding mechanism needs to be removed, and the installation and removal of the quartz tube can only The forward-forward approach leads to low production efficiency. Contents of the invention [0003] Aiming at the problems in the prior art, the invention provides a furnace door structure of a diffusion furnace. [0004] For realizing above technical purpose, technical scheme of the present invention is: [0005] A furnace door structure for a diffusion furnace, a furnace door body and a furnace door driving mechanism; [0006] The furnace ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27D1/18
CPCF27D1/1858
Inventor 陈庆敏
Owner 无锡松煜科技有限公司
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