Wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment

A mass spectrometer measurement and adjustable technology, applied in mass spectrometers, dynamic spectrometers, separation tube vacuum systems, etc., can solve the problems of reducing the quality of plasma treatment, reducing the vacuum degree of the acceleration chamber, and the trajectory error of the directional deflection of the plasma, etc. It is suitable for promoting use, improving vacuum degree and flexible use.

Pending Publication Date: 2019-02-26
HEFEI CAS ION MEDICAL & TECHNICAL DEVICES CO LTD
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that there is often residual gas in the vacuum in the acceleration chamber of the existing cyclotron, and the residual gas will reduce the vacuum degree in the acceleration chamber,

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  • Wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment

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Embodiment Construction

[0023] The technical solutions of the present invention will be clearly and completely described below in conjunction with embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0024] See figure 1 As shown, a large-range adjustable mobile vacuum mass spectrometry measurement equipment, including differential vacuum chamber, pumping unit, differential vacuum gauge PKR251, inlet vacuum gauge, quadrupole mass spectrometer RGA, CF100 plug-in valve 1, CF35 Plug-in valve two, VAT590 fine-tuning valve, KF40 angle valve and vacuum pipeline. The bottom of the differential vacuum chamber is connected to the pumping unit through CF100 plug-in valve 1. The differential pipeline, the differential va...

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Abstract

The invention discloses wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment which comprises a differential vacuum chamber, an air pumping set, a differential vacuum gauge,an air inlet vacuum gauge, a four-stage rod mass spectrometer, a first sluice damper, a second sluice damper, a micro-adjustable valve, an angle valve and a vacuum pipe. The bottom of the differential vacuum chamber is connected with the air pumping set through the first sluice damper. The side surface of the differential vacuum chamber is provided with two interface flanges, wherein one interface flange is connected with the differential vacuum gauge and the four-stage rod mass spectrometer through a tee joint. The wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment has beneficial effects of a, wide measuring range; b, high movability; c, automatic sampling rate adjustment; and d, gas component analysis diversity. The equipment can effectively analyze the residual gas component in vacuum for facilitating analysis for the main source of the gas component, thereby taking targeted measures for increasing the vacuum degree. The equipment has high social benefit and is suitable for popularization.

Description

Technical field [0001] The invention relates to a measuring device, in particular to a large-range adjustable mobile vacuum mass spectrometry measuring device, belonging to the technical field of vacuum mass spectrometry measuring device application. Background technique [0002] In the cyclotron, under the combined action of the electric field and the magnetic field, the plasma will undergo directional deflection and acceleration, and will eventually be transmitted to the treatment head through the transport line. The function of high vacuum is to increase the mean free path of the plasma and reduce the collision of the plasma with other particles in the vacuum during the deflection and acceleration process, resulting in deviation from the deflection direction. [0003] Existing cyclotrons often have residual gas in the vacuum in the acceleration chamber. The residual gas composition mainly comes from the release of internal material surface gas, vacuum leakage, gas penetration, e...

Claims

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Application Information

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IPC IPC(8): H01J49/02H01J49/04H01J49/24H01J49/42
CPCH01J49/24H01J49/02H01J49/0422H01J49/42
Inventor 宋云涛沈国清杨庆喜陈根陈永华
Owner HEFEI CAS ION MEDICAL & TECHNICAL DEVICES CO LTD
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