Wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment

Abstract

The invention discloses wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment which comprises a differential vacuum chamber, an air pumping set, a differential vacuum gauge,an air inlet vacuum gauge, a four-stage rod mass spectrometer, a first sluice damper, a second sluice damper, a micro-adjustable valve, an angle valve and a vacuum pipe. The bottom of the differential vacuum chamber is connected with the air pumping set through the first sluice damper. The side surface of the differential vacuum chamber is provided with two interface flanges, wherein one interface flange is connected with the differential vacuum gauge and the four-stage rod mass spectrometer through a tee joint. The wide-measuring-range adjustable movable vacuum mass spectrum measuring equipment has beneficial effects of a, wide measuring range; b, high movability; c, automatic sampling rate adjustment; and d, gas component analysis diversity. The equipment can effectively analyze the residual gas component in vacuum for facilitating analysis for the main source of the gas component, thereby taking targeted measures for increasing the vacuum degree. The equipment has high social benefit and is suitable for popularization.

Description

Technical field [0001] The invention relates to a measuring device, in particular to a large-range adjustable mobile vacuum mass spectrometry measuring device, belonging to the technical field of vacuum mass spectrometry measuring device application. Background technique [0002] In the cyclotron, under the combined action of the electric field and the magnetic field, the plasma will undergo directional deflection and acceleration, and will eventually be transmitted to the treatment head through the transport line. The function of high vacuum is to increase the mean free path of the plasma and reduce the collision of the plasma with other particles in the vacuum during the deflection and acceleration process, resulting in deviation from the deflection direction. [0003] Existing cyclotrons often have residual gas in the vacuum in the acceleration chamber. The residual gas composition mainly comes from the release of internal material surface gas, vacuum leakage, gas penetration, e...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that there is often residual gas in the vacuum in the acceleration chamber of the existing cyclotron, and the residual gas will reduce the vacuum degree in the acceleration chamber, resulting in an error in the trajectory of the plasma orientation deflection, reducing the plasma In order to solve the problem of treatment quality of the body, a large-scale adjustable mobile vacuum mass spectrometer measurement device is proposed

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