Tray supporting and fixing device

A fixing device and tray technology, which is applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of tray shaking, tray rollover, etc., improve heating efficiency, reduce contact area, and weaken heat conduction The effect of action

Active Publication Date: 2019-03-29
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But for induction heating, due to the current induced in the tray located in the magnetic field, the tray will be affected by the magnetic field, which will exert a periodically changing electromagnetic force on the tray, which will cause the tray to shake
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Method used

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  • Tray supporting and fixing device
  • Tray supporting and fixing device

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Embodiment Construction

[0033] The disclosure provides a tray supporting and fixing device, which is used to fix the tray on the rotating shaft of the thin film material growth equipment and rotate with the rotating shaft at low or high speed stably, which solves the problem of shaking or shaking of the tray that may be caused by electromagnetic force in induction heating. The problem of rollover can be avoided, and at the same time, it can also reduce the radiation heat loss to the surrounding space after the tray is heated up, and further improve the heating efficiency.

[0034] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0035] In a first exemplary embodiment of the present disclosure, a pallet support and securing device is provided.

[0036] figure 1 It is a structural schematic diagra...

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PUM

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Abstract

The invention discloses a tray supporting and fixing device which comprises a ceramic disc, a pressing block and a metal support. The ceramic disc is used for placing a tray, the pressing block is arranged on the edge of the ceramic disc and used for fixing the tray to the ceramic disc, the metal support is fixed below the ceramic disc and provided with n support arms, n is larger than or equal to3, the support arms are used for supporting the ceramic disc and fixed to a rotating shaft which achieves tray rotation, in the rotation process, the ceramic disc and the tray placed on the ceramic disc are driven to stably rotate together, and the length of a support arm of the metal support is smaller than the radius of the ceramic disc. The problem of tray waggling or lateral turning possiblycaused by electromagnetic force in induction heating is solved, radiation heat loss caused by tray heating to surrounding space can be reduced, and heating efficiency is further improved.

Description

technical field [0001] The disclosure belongs to the field of thin film material growth equipment manufacturing, and relates to a tray supporting and fixing device. Background technique [0002] Thin film material growth equipment is an important process equipment in the production process of semiconductor technology, microelectronics technology, etc., and its design and manufacturing technology level are very critical to the performance of semiconductor devices. Metal-organic chemical vapor deposition (MOCVD, Metal-organic Chemical Vapor Deposition) is a commonly used semiconductor thin film material growth equipment, which plays an important role in the large-scale production of the semiconductor industry. In recent years, it is the epitaxial growth of indium phosphide, One of the most important devices for compound semiconductors such as gallium arsenide, zinc oxide, and gallium nitride. [0003] MOCVD uses organic compounds of Group III and II elements and hydrides of G...

Claims

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Application Information

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IPC IPC(8): C23C16/458
CPCC23C16/4584
Inventor 王晓亮徐健凯姜丽娟王权冯春肖红领
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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