Pallet Support and Fixtures

A fixing device and tray technology, which is applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of tray rollover, tray shaking, etc., improve heating efficiency, reduce contact area, and weaken heat conduction The effect of action

A fixing device and tray technology, which is applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of tray rollover, tray shaking, etc., improve heating efficiency, reduce contact area, and weaken heat conduction The effect of action

CN109536928BActive Publication Date: 2020-10-09INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI +1
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  • Pallet Support and Fixtures
  • Pallet Support and Fixtures

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Embodiment Construction

[0033] The disclosure provides a tray supporting and fixing device, which is used to fix the tray on the rotating shaft of the thin film material growth equipment and rotate with the rotating shaft at low or high speed stably, which solves the problem of shaking or shaking of the tray that may be caused by electromagnetic force in induction heating. The problem of rollover can be avoided, and at the same time, it can also reduce the radiation heat loss to the surrounding space after the tray is heated up, and further improve the heating efficiency.

[0034] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0035] In a first exemplary embodiment of the present disclosure, a pallet support and securing device is provided.

[0036] figure 1 It is a structural schematic diagra...

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Abstract

The invention discloses a tray supporting and fixing device which comprises a ceramic disc, a pressing block and a metal support. The ceramic disc is used for placing a tray, the pressing block is arranged on the edge of the ceramic disc and used for fixing the tray to the ceramic disc, the metal support is fixed below the ceramic disc and provided with n support arms, n is larger than or equal to3, the support arms are used for supporting the ceramic disc and fixed to a rotating shaft which achieves tray rotation, in the rotation process, the ceramic disc and the tray placed on the ceramic disc are driven to stably rotate together, and the length of a support arm of the metal support is smaller than the radius of the ceramic disc. The problem of tray waggling or lateral turning possiblycaused by electromagnetic force in induction heating is solved, radiation heat loss caused by tray heating to surrounding space can be reduced, and heating efficiency is further improved.

Description

technical field [0001] The disclosure belongs to the field of thin film material growth equipment manufacturing, and relates to a tray supporting and fixing device. Background technique [0002] Thin film material growth equipment is an important process equipment in the production process of semiconductor technology, microelectronics technology, etc., and its design and manufacturing technology level are very critical to the performance of semiconductor devices. Metal-organic chemical vapor deposition (MOCVD, Metal-organic Chemical Vapor Deposition) is a commonly used semiconductor thin film material growth equipment, which plays an important role in the large-scale production of the semiconductor industry. In recent years, it is the epitaxial growth of indium phosphide, One of the most important devices for compound semiconductors such as gallium arsenide, zinc oxide, and gallium nitride. [0003] MOCVD uses organic compounds of Group III and II elements and hydrides of G...

Claims

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Application Information

Patent Timeline
09 Oct 2020
Publication
CN109536928B
IPC
C23C16/458
CPC
C23C16/4584
Inventors
王晓亮; 徐健凯