Analysis apparatus and analysis method

An analysis device and signal separation technology, which is applied in the direction of analyzing materials, measuring devices, and material analysis through optical means, can solve problems such as cost increase, suppress the reduction of wavelength resolution, improve wavelength resolution, and reduce technical difficulty Effect

Active Publication Date: 2019-04-09
HORIBA LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the shorter the pulse width, the higher the technology required to drive the semiconductor laser's drive substrate, resulting in a corresponding increase in the cost of this part

Method used

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  • Analysis apparatus and analysis method
  • Analysis apparatus and analysis method
  • Analysis apparatus and analysis method

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Embodiment Construction

[0038] Hereinafter, an analysis device 100 according to an embodiment of the present invention will be described with reference to the drawings.

[0039] This analysis device 100 measures components to be measured (here, for example, CO, CO, etc.) contained in sample gas such as exhaust gas. 2 , N 2 O, NO, NO 2 、H 2 O, SO2, CH 4 , NH 3 etc.) Concentration measuring devices such as figure 1 As shown, it has: a measuring chamber 1 for introducing sample gas; a plurality of semiconductor lasers 2 are light sources for irradiating laser light to the measuring chamber 1; a photodetector 3 is arranged on the optical path of the laser light passing through the measuring chamber 1 to receive The laser light; and the signal processing device 4 receives the light intensity signal which is the output signal of the photodetector 3, and calculates the concentration of the component to be measured based on the value.

[0040] Each part is explained.

[0041] The chamber 1 is made of ...

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Abstract

The present invention relates to an analysis apparatus 100 adapted to analyze measurement target components contained in a sample by irradiating a measurement cell 1 into which the sample is introduced with pulsed laser light, wherein the analysis apparatus 100 includes multiple semiconductor lasers 2 adapted to produce pulsed laser light at wavelengths absorbed by the measurement target components, a light detector 3 adapted to detect light emitted from the semiconductor lasers 2 and transmitted through the measurement cell 1, and a signal separation part 6 adapted to separate, from a light intensity signal obtained by the light detector 3, signals corresponding to a part of the pulses from the semiconductor lasers.

Description

technical field [0001] The present invention relates to an analysis device and analysis method used for, for example, component analysis of gas. Background technique [0002] Conventionally, as an analyzer using a semiconductor laser, as disclosed in Patent Document 1, a laser gas analyzer of a wavelength modulation method (or also referred to as a frequency modulation method) can be considered. The analysis method used by this laser gas analyzer is as follows: the injection current injected into the semiconductor laser is modulated, the oscillation wavelength of the semiconductor laser is scanned, the absorption spectrum of the measurement target component contained in the gas is obtained, and the concentration is quantitatively analyzed (TDLAS: Tunable Diode Laser Absorption Spectroscopy). In addition, in order to improve the detection sensitivity of this laser gas analyzer, a current modulation with a small amplitude is applied at a frequency sufficiently higher than the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/31
CPCG01N21/31G01J3/10G01J3/433G01J3/4338G01J2003/4332G01J2003/4334G01N2201/12G01J2001/4242G01N21/39G01N21/3504G01N2021/396
Inventor 涩谷享司福城显辅太田敏雄西村克美
Owner HORIBA LTD
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