MEMS clip-shaped solenoid transformer, and manufacturing method thereof

Abstract

Embodiments of the invention provide a MEMS clip-shaped solenoid transformer, comprising: a silicon substrate, a clip-shaped soft magnetic core, a first solenoid, and a second solenoid, wherein the clip-shaped soft magnetic core is wrapped inside the silicon substrate, the silicon substrate is provided with a first spiral channel and a second spiral channel, two opposite sides of the clip-shaped soft magnetic core respectively pass through the centers of the first spiral channel and the second spiral channel, and the first solenoid and the second solenoid are respectively disposed in the firstspiral channel and the second spiral channel. By placing the clip-shaped soft magnetic core, the first solenoid and the second solenoid of the transformer all inside the silicon substrate, the thickness of the silicon substrate is fully utilized, the obtained winding cross-sectional area of the transformer is larger, and the magnetic flux is higher, which makes the inductance of the transformer high. At the same time, the silicon substrate can protect the clip-shaped soft magnetic core, the first solenoid and the second solenoid, which improves the strength of the transformer and has good impact resistance.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of micro-electromechanical systems (MEMS), and more specifically, relate to a MEMS loop-shaped solenoid transformer and a manufacturing method thereof. Background technique [0002] Micro-Electro-Mechanical System (MEMS) micro-transformer uses the principle of electromagnetic induction to transmit electric energy between two circuits. It is composed of a magnetic core and a winding. Compared with a conventional transformer, the size of the magnetic core is greatly reduced, and the winding The format has also changed. Microtransformers are widely used in microelectronic equipment and information equipment, and can perform functions such as voltage conversion, current conversion, impedance conversion, isolation, and voltage stabilization. [0003] At present, microtransformers based on MEMS technology are mainly divided into two types, planar spiral type and solenoid type. Among them, a...

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Problems solved by technology

[0004] However, most of the micro-transformers based on the MEMS process currently use thin-film manufacturing technology. The thin-film manufacturing process is an additive manufacturing method, so most of the structure of the obtained micro-transformer is on the substrate, which makes it difficult to guarantee the strength of the transformer. , poor impact resistance; at the same time, the vertical height that can be obtained by using the thin film manufacturing process is limited, so that the cross-sectional area of ​​the transformer winding is small, resulting in low inductance value and small magnetic flux of the transformer

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