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Practical diffusion furnace pressure sensor protection system

A pressure sensor and protection system technology, applied to the maintenance of heating chambers, furnaces, furnace components, etc., can solve the problems of pressure sensor electrical structure corrosion damage, abnormal shutdown, etc., to improve manufacturing waste, solve corrosion damage, and reduce corrosion Effect

Pending Publication Date: 2019-04-19
TONGWEI SOLAR ENERGY (CHENGDU) CO LID
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a practical diffusion furnace pressure sensor protection system to solve the problem that the acidic tail gas produced by the existing process is easy to cause corrosion damage to the electrical structure of the pressure sensor, resulting in abnormal shutdown of the production process

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A practical diffusion furnace pressure sensor protection system, including a pressure sensor and a detection chamber at the lower part of the pressure sensor, and a T-shaped pipe, the upper end of the vertical pipe section of the T-shaped pipe communicates with the opening at the lower end of the detection chamber, The lower end of the vertical pipe section of the T-shaped pipeline is provided with a vacuum detection port, the horizontal pipe section of the T-shaped pipeline is provided with a nitrogen gas inlet passage, and the vertical pipe section of the T-shaped pipeline is provided with a nitrogen gas inlet pipe. One end of the inlet pipe passes through the opening at the lower end of the detection chamber and extends into the detection chamber, the other end of the nitrogen inlet pipe communicates with the nitrogen inlet passage, and the horizontal pipe section of the T-shaped pipe is also equipped with a Pneumatic valve for opening and closing the intake passage. ...

Embodiment 2

[0023] On the basis of Example 1, the nitrogen intake pipe is an L-shaped intake pipe.

Embodiment 3

[0025] On the basis of the above embodiments, the length of the vertical section of the L-shaped air intake pipe is greater than the length of the horizontal section of the L-shaped air intake pipe.

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PUM

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Abstract

The invention discloses a practical diffusion furnace pressure sensor protection system, and belongs to the technical field of photovoltaic device production. The invention aims at solving the problems that for an existing technology, generated acid tail gas can cause corrosion damage to the pressure sensor electrical structure, and abnormal shutdown is caused in the production process. The practical diffusion furnace pressure sensor protection system comprises a pressure sensor and a detection chamber below the pressure sensor, and a T-shaped pipeline is arranged, wherein the upper end of a vertical pipe section of the T-shaped pipeline communicates with an opening at the lower end of the detection chamber, the lower end of the vertical pipe section of the T-shaped pipeline is provided with a vacuum detection port, a nitrogen inlet channel is formed in a cross pipe section of the T-shaped pipeline, a nitrogen inlet pipe is arranged in the vertical pipe section of the T-shaped pipeline, one end of the nitrogen inlet pipe extends into the detection chamber, the other end of the nitrogen inlet pipe communicates with the nitrogen inlet channel, and a pneumatic valve is further installed on the cross pipe section of the T-shaped pipeline. The practical diffusion furnace pressure sensor protection system is suitable for diffusion furnace pressure sensor protection.

Description

technical field [0001] The invention belongs to the technical field of photovoltaic equipment production, and in particular relates to a practical protection system for a pressure sensor of a diffusion furnace. Background technique [0002] With the rapid development of the photovoltaic industry and the increasing number of manufacturers of solar and photovoltaic cell products, most companies have higher and higher requirements for manufacturing cost control. People tend to localize the main equipment for the production of solar photovoltaic cell products. The research and invention of component parts and the trend of manufacturing costs are gradually reduced, and the simple and flexible operation performance has become the main focus of many battery product manufacturers. [0003] For diffusion furnaces, especially low-pressure diffusion furnaces, the pressure detection inside the furnace tube is particularly important, because in the same furnace tube, when the volume of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F27D21/00F27D7/06H01L31/18
CPCH01L31/18F27D7/06F27D21/00F27D2007/063F27D2021/0007F27D2021/0078Y02P70/50
Inventor 雷小龙李宝飞吕飞李富林李龙
Owner TONGWEI SOLAR ENERGY (CHENGDU) CO LID