Device and method for preparing titanium-boron-nitrogen compound powder
A technology for preparing nitrogen compounds and powders, applied in boron compounds, chemical instruments and methods, inorganic chemistry, etc., can solve the problems of high cost, many impurities, long time, etc., and achieve high purity of synthetic powder, broad application prospects, and synthesis temperature. low effect
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Embodiment 1
[0032] 1. Preparation of Ti Powder
[0033] Prepare Ti powder, the particle size of the powder is -100 mesh, and the purity is above 95%. Put the Ti powder into the electric furnace, and the electric furnace is sealed and isolated from the outside air.
[0034] 2. Heating electric furnace
[0035] The compound synthesis temperature was set at 700°C, and the electric furnace was heated to 700°C.
[0036] 3. Introduce gas
[0037] When the vacuum degree in the furnace reaches 1x10-2Pa, N2 gas is introduced, and the flow rate is 100-150 liters / hour. When the temperature of the electric furnace reaches 700°C, H2 and BCl3 gases are introduced, and the ratio of N2 and H2 is 75vol%:25vol%. BCl The feed rate of gas is 5vol% of the sum of the above two gases. Keep warm for 3 hours.
[0038] Step 4, discharge
[0039] Close each intake valve and vacuum valve, open the furnace door after the furnace temperature drops to room temperature, and take out the synthesized powder product....
Embodiment 2
[0041] 1. Preparation of Ti Powder
[0042] Prepare Ti powder, the particle size of the powder is -150 mesh, and the purity is above 98%. Put the Ti powder into the electric furnace, and the electric furnace is sealed and isolated from the outside air.
[0043] 2. Heating electric furnace
[0044] The compound synthesis temperature was set at 860°C, and the electric furnace was heated to 860°C.
[0045] 3. Introduce gas
[0046] When the vacuum degree in the furnace reaches 1x10-2Pa, N2 gas is introduced, and the flow rate is 100-150 liters / hour. When the temperature of the electric furnace reaches 860°C, H2 and BCl3 gases are introduced, and the ratio of N2 and H2 is 60vol%:40vol%. BCl3 gas feed is the 3vol% of the sum of the above two gases. Keep warm for 3 hours.
[0047]Step 4, discharge
[0048] Close each intake valve and vacuum valve, open the furnace door after the furnace temperature drops to room temperature, and take out the synthesized powder product. The che...
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