Non-evapotranspiration type thin film getter and preparation method thereof

A non-evaporative, getter technology, applied in separation methods, chemical instruments and methods, dispersed particle separation, etc., can solve the problems of limiting the service life of components, maintaining the vacuum degree of the cavity, etc., to extend the service life, increase the Inhalation capacity, the effect of increasing the specific surface area
CN109680249AInactive Publication Date: 2019-04-26SUZHOU UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SUZHOU UNIV
Publication Date
2019-04-26
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a non-evapotranspiration type thin film getter and a preparation method of the non-evapotranspiration type thin film getter. The preparation method comprises the steps that target materials are deposited in a packaging cavity in a single-layer or multi-layer mode by adopting an evaporation or magnetron sputtering way; and during deposition, the packaging cavity or an evaporation source / target material is inclined, and therefore a thin film with an inclined and separated nanocolumn microstructure is obtained in the packaging cavity. The invention further provides the non-evapotranspiration type thin film getter prepared by the preparation method. By means of the preparation method, the columnar porous thin film getter with the large specific surface area can be obtained, gas can be more easily dispersed, and therefore the getting capacity of the thin film getter can be increased.
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Description

technical field

[0001] The invention relates to the technical field of metal getters, in particular to a non-evaporable film getter and a preparation method thereof. Background technique

[0002] In vacuum electronic technology, residual active gas will have an important impact on the reliability, stability and service life of MEMS devices such as microbolometers, gyroscopes, and micromechanical resonators, and is often the main cause of device performance degradation or even failure. one of the reasons. Nowadays, as the volume of devices continues to shrink, it is an inevitable development trend of vacuum packaging (Vacuum Packaging) to maintain and improve the vacuum level of devices by using thin film getter films to absorb residual active gas molecules.

[0003] The main functional units of MEMS (Microelectro Mechanical Systems) devices or systems are sensors and drivers, and the existence of "moving" units is a typical feature of most MEMS devices. Moving parts will b...

Claims

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