Non-evapotranspiration type thin film getter and preparation method thereof

A non-evaporative, getter technology, applied in separation methods, chemical instruments and methods, dispersed particle separation, etc., can solve the problems of limiting the service life of components, maintaining the vacuum degree of the cavity, etc., to extend the service life, increase the Inhalation capacity, the effect of increasing the specific surface area

Inactive Publication Date: 2019-04-26
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] 3. The unsustainable air absorption of the film getter limits the service life of components: there is a certain air leakage in the sealing ring in the vacuum package, so the film getter is required to continuously inhale under long-term working conditions to m

Method used

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  • Non-evapotranspiration type thin film getter and preparation method thereof
  • Non-evapotranspiration type thin film getter and preparation method thereof
  • Non-evapotranspiration type thin film getter and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0039] Ti films were deposited on silicon wafers with inclination angles of 50° and 70° respectively, and columnar films with inclination angles of 29° and 46° were deposited. The inclination angle conforms to the theoretical formula tanα=2×tanβ, and the theoretical values ​​of the β angles should be 31° and 54° respectively. After testing, the porosity of the film is 25% and 55%, respectively, which indicates that the oblique-angle deposition method of this embodiment can deposit a porous film.

[0040] Then, a gold layer is covered on the surface of the film to obtain a film structure such as image 3 shown. Among them, 300 is a columnar porous thin film getter, and 301 is a 10-50 thick nanometer protective layer covered on the surface of the thin film getter. The structure is dense. The protective layer can prevent the surface of the getter from being polluted when it is not activated.

[0041] Under the activation conditions of 300°C and 1h, the above-mentioned film gett...

Embodiment 2

[0043] Before depositing the film, the cavity is wet-etched to etch out such as figure 2 The cavity is inclined at an angle of 54.7°. Next, a thin film is deposited in the cavity to obtain a porous columnar thin film. After testing, its air-absorbing capacity is about 20 times that of the non-columnar film.

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Abstract

The invention discloses a non-evapotranspiration type thin film getter and a preparation method of the non-evapotranspiration type thin film getter. The preparation method comprises the steps that target materials are deposited in a packaging cavity in a single-layer or multi-layer mode by adopting an evaporation or magnetron sputtering way; and during deposition, the packaging cavity or an evaporation source/target material is inclined, and therefore a thin film with an inclined and separated nanocolumn microstructure is obtained in the packaging cavity. The invention further provides the non-evapotranspiration type thin film getter prepared by the preparation method. By means of the preparation method, the columnar porous thin film getter with the large specific surface area can be obtained, gas can be more easily dispersed, and therefore the getting capacity of the thin film getter can be increased.

Description

technical field [0001] The invention relates to the technical field of metal getters, in particular to a non-evaporable film getter and a preparation method thereof. Background technique [0002] In vacuum electronic technology, residual active gas will have an important impact on the reliability, stability and service life of MEMS devices such as microbolometers, gyroscopes, and micromechanical resonators, and is often the main cause of device performance degradation or even failure. one of the reasons. Nowadays, as the volume of devices continues to shrink, it is an inevitable development trend of vacuum packaging (Vacuum Packaging) to maintain and improve the vacuum level of devices by using thin film getter films to absorb residual active gas molecules. [0003] The main functional units of MEMS (Microelectro Mechanical Systems) devices or systems are sensors and drivers, and the existence of "moving" units is a typical feature of most MEMS devices. Moving parts will b...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/35C23C14/02C23C14/14B01J20/28B01D53/02
CPCB01D53/02B01J20/28033C23C14/021C23C14/14C23C14/226C23C14/24C23C14/35
Inventor 吴鸣
Owner SUZHOU UNIV
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