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A graphene resonant fiber optic accelerometer based on pressure sensitivity

An accelerometer and resonant technology, which is applied in the field of photoelectric detection and micro/nano electromechanical systems, can solve the problems of restricting structural design and difficulty in manufacturing technology, and achieves the advantages of easy design, manufacture and installation, low loss, and avoiding damage or defects. Effect

Active Publication Date: 2020-09-01
BEIHANG UNIV
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Problems solved by technology

[0004] For resonant sensors, choosing different excitation and detection methods limits the difficulty of its structural design and manufacturing process to a certain extent.

Method used

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  • A graphene resonant fiber optic accelerometer based on pressure sensitivity
  • A graphene resonant fiber optic accelerometer based on pressure sensitivity

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0029] Such as figure 1 , figure 2 As shown, a kind of pressure-sensitive graphene resonant optical fiber accelerometer based on the present embodiment mainly includes an optical fiber 1, a ferrule 2, an elastic sheet 3, a sealing plug 4, a gas sealing cavity 5, a graphene film 6, an optical fiber 1 Inserted to a certain distance from the lower end surface of the ferrule 2, the front end of the optical fiber and the graphene film 6 adsorbed on the lower end surface of the ferrule form a Fabry-Perot interference cavity; the ferrule 2 and the elastic sheet 3, and the elastic sheet 3 and the gas The sealing chambers 5 are all fixed and closed connections, so as to realize the sealing of the upper end of the chamber; after the filling gas enters the sealing chamber through the air inlet on the lower side of the gas sealing chamber 5, it is insert...

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Abstract

The invention discloses a pressure-sensitive-based graphene resonant fiber accelerometer comprising an optical fiber (1), a ferrule (2), an elastic sheet (3), a sealing plug (4), a gas sealed cavity (5), and a graphite film (6). The acceleration measurement is realized by using the internal pressure of the direct sensitive cavity of the graphene film. The ferrule mounted on the elastic sheet directly senses the measured acceleration as a main additional mass and the elastic sheet is driven to make longitudinal displacement, so that the gas pressure in the sealed cavity is caused to change; thepressure is applied to the graphene film to change the in-plane stress, so that the change of the resonance frequency of the graphene film is caused; and the demodulation resonance frequency is detected by the interference light to realize acceleration measurement. With full utilization of the mechanical, optical and resonance characteristics of grapheme, the accelerometer has the outstanding characteristics of high sensitivity, large measuring range, strong anti-interference ability, great easiness in manufacture and installation.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection and micro / nano electromechanical systems, in particular to a graphene resonant optical fiber accelerometer based on pressure sensitivity. Background technique [0002] The resonant sensor is a sensor realized by the inherent resonant characteristics of the resonant element changing with the measured change rule. It is a periodic signal output, which can be converted into a digital signal that is easy for the microprocessor to receive with only a simple digital circuit; at the same time, due to The repeatability, resolution and stability of the resonance sensitive unit are very good, so the resonance measurement principle is widely used in the field of inertial measurement. The resonant micromachined accelerometer (MEMS) is based on the traditional acceleration measurement mechanism. The acceleration is converted into inertial force through the sensitive mass, which causes the reson...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/03
Inventor 樊尚春石福涛李成
Owner BEIHANG UNIV
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