A dual-probe atomic force microscope

An atomic force microscope and dual-probe technology, applied in scanning probe microscopy, scanning probe technology, instruments, etc., can solve the problems of low vibration frequency and low detection sensitivity in non-resonant mode, and avoid mechanical spurious peaks, The effect of high detection sensitivity and wide application range

Active Publication Date: 2021-12-17
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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Problems solved by technology

[0004] Based on the above, the object of the present invention is to provide a dual-probe atomic force microscope to solve the low detection sensitivity and non-resonant mode vibration frequency of the existing dual-probe atomic force microscope due to mechanical miscellaneous peaks caused by piezoelectric ceramic excitation. too low problem

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  • A dual-probe atomic force microscope
  • A dual-probe atomic force microscope

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Embodiment Construction

[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific implementation manners described here are only used to explain the present invention, rather than to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

[0030] like Figure 1-Figure 2 As shown, this embodiment provides a dual-probe atomic force microscope, which includes a mechanical detection component 1 , a photothermal excitation component 2 , an optical component 3 and a probe component 4 . The mechanical detection component 1 includes a mechanical detection laser 11 for emitting a detection laser 12 . The photothermal actuation component 2 includes a photothermal laser 21 for emitting a photothermal laser 22 . The probe assembly 4 includes a ...

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Abstract

The invention relates to the technical field of atomic force microscopes, and discloses a dual-probe atomic force microscope. The double-probe atomic force microscope includes two sets of mechanical detection components, two sets of photothermal excitation components, two sets of probe components and optical components. The photothermal laser of the thermal laser, the probe assembly includes a microcantilever and a probe tip fixed on the microcantilever, the optical assembly can focus the detection laser on the front end of the microcantilever, and focus the photothermal laser on the front of the microcantilever rear end. The invention adopts two sets of probe components, which have high detection sensitivity; adopts photothermal excitation components to control the vibration frequency of the microcantilever, avoiding the appearance of mechanical miscellaneous peaks, and two sets of mechanical detection components and two sets of photothermal excitation components share a set of optical components, compact structure.

Description

technical field [0001] The invention relates to the technical field of atomic force microscopes, in particular to a dual-probe atomic force microscope. Background technique [0002] Atomic Force Microscope (AFM) is an important tool for micro-nano scale morphology characterization, physical property measurement and micro-nano manipulation. The optical path structure of the atomic force microscope includes the probe tip and the micro-cantilever. The probe tip is fixed on the micro-cantilever. There is an interaction force between the atoms at the probe tip and the atoms on the surface of the sample to be measured. The interaction force varies with the distance between the two atoms. The interaction force will cause the deformation of the micro-cantilever. With the deformation as feedback, the distance between the atoms at the tip of the probe and the atoms on the surface of the sample to be measured is controlled by adjusting the up and down movement of the probe. , move the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/24G01Q60/38
Inventor 李鹏裘晓辉
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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