Ionic liquid and micro-nanometer solid cooperative enhanced grinding liquid and preparation method thereof

Abstract

The invention relates to ionic liquid and micro-nanometer solid cooperative enhanced grinding liquid and a preparation method thereof. The ionic liquid and micro-nanometer solid cooperative enhanced grinding liquid can be used as grinding liquid of semiconductors and metal materials. The grinding liquid is prepared from the major ingredients of molybdenum disulfide particles, carbon nanometer tubes, ionic liquid, dispersing agents and water according to the mass percent of (0.5 to 3 percent):(0.5 to 3 percent):(0.2 to 0.5 percent):(0.3 to 2 percent):(98.5 to 91.5 percent). According to the grinding liquid, the molybdenum disulfide particles and the carbon nanometer tubes can cooperatively enhance the lubricating performance of various dimensions of abrasive particles during grinding wheelgrinding; the molybdenum disulfide particles, the carbon nanometer tubes and ionic liquid are mutually stacked for cooperatively enhancing the cooling performance and the lubricating performance of the grinding liquid; the ionic liquid and the carbon nanometer tubes mutually generate the stacking and electrostatic effects; the ionic liquid and the dispersing agents cooperatively enhance the dispersion stabilization performance of the molybdenum disulfide particles and the carbon nanometer tubes in the grinding liquid. The ingredients achieve an environment-friendly effect; the preparation steps are simple; the dispersing performance is stable; the lubrication and cooling performance is excellent; the lubrication and cooling performance of the grinding processing can be effectively improved.

Description

technical field [0001] The invention relates to an ionic liquid and a micro-nano solid synergistically strengthened grinding fluid and a preparation method thereof, which can be used as a grinding fluid for semiconductors and metal materials. Improve the quality of grinding process. Background technique [0002] During the grinding process, both cutting and scoring and scratching occur between the grinding wheel and the material, generating a large amount of grinding heat, and the temperature in the grinding zone can reach about 400-1000°C. At such a high temperature, the material will Deformation and burns, the grinding wheel will also be severely worn, and the grinding quality will decline. Under normal circumstances, grinding fluid is used in grinding to remove a large amount of grinding heat and reduce the temperature in the grinding area. According to relevant literature reports: Effective use of grinding fluid can increase cutting speed by 30%, reduce temperature to ...

AI Technical Summary

Problems solved by technology

Due to the strong van der Waals interaction and weak solubility between carbon nanotubes, it is difficult for carbon nanotubes to dissolve into water and other organic solvents, which greatly limits their application in liquid phase.

Images