CMOS sensor-based three-dimensional high-sensitivity micro-force measuring meter

Abstract

The invention discloses a CMOS sensor-based three-dimensional high-sensitivity micro-force measuring meter. A force measuring unit and a sensing unit are arranged in a cylindrical inner cavity formedby an upper cover plate and a cylindrical body; the force measuring unit is a beryllium copper reed; the beryllium copper reed is provided with an outer fixing ring and a central disk plane connectedby an elastic beam; the ytterbium copper reed is supported on the upper cover plate through the outer fixing ring; the upper surface of the center disk plane is provided with a force measuring probe;the lower surface of the center disk plane is provided with a first planar reflector; the reflection surface of the first planar reflector faces horizontally downwards; according to the sensing unit,a laser, a second planar reflector, a focusing lens and a CMOS sensor are arranged in the cylindrical inner cavity; the emergent light of the laser is sequentially reflected by the second planar reflector and the first planar reflector, and the reflected light enters the focusing lens; the focused emergent light enters the photosensitive surface of the CMOS sensor; and the output signals of the CMOS sensor are adopted as the output detection signals of the micro-force measuring meter. The CMOS sensor-based three-dimensional high-sensitivity micro-force measuring meter of the invention has theadvantages of high sensitivity, adjustable range, high measurement resolution and high precision.

Description

technical field [0001] The invention belongs to the field of high-precision micro-force measurement, and more specifically relates to a three-dimensional high-sensitivity micro-force meter based on a CMOS sensor. Background technique [0002] In recent years, microelectromechanical devices (MEMS) have been greatly developed, and their application range is becoming wider and wider. In order to evaluate the performance of MEMS devices, it is necessary to use high-precision micro-nano probes, and to accurately determine the mechanical parameters of high-precision micro-nano probes requires the use of high-precision micro-forcemeters. In addition, high-precision micro-force gauges can also be used for precision weighing, such as drug composition analysis, etc., and are widely used. [0003] The dynamometers in the prior art, such as strain gauge force sensors, have low sensitivity, are easily affected by temperature and humidity, and have high processing costs; MEMS dynamometer...

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Problems solved by technology

[0003] The dynamometers in the prior art, such as strain gauge force sensors, have low sensitivity, are easily affected by temperature and humidity, and have high processing costs; MEMS dynamometers have high detection accuracy, but their processing costs are high and the output signal is weak , is easily affected by the temperature of the test environment, and has high requirements for the post-processing circuit; the fiber Bragg grating (FBG) dynamometer can achieve high sensitivity, but the detection accuracy depends on the demodulation process of the post-processing to achieve high precision The required cost is relatively high; in addition, there is also a magnetoelectric dynamometer, which has a small detection range, has high requirements for the measurement environment, is easily affected by environmental electromagnetic interference, and has a complicated manufacturing process

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