MEMS space electric field intensity sensor, and measuring system and method
A space electric field and intensity measurement technology, applied in electrostatic field measurement and other directions, can solve the problem that the measurement results cannot be well reflected, and achieve the effect of easy integration and realization of intelligence, high reliability and light weight
Inactive Publication Date: 2019-06-14
赵青
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Problems solved by technology
The disadvantage is: because it is a measurement method based on the principle of induced charge, it can better reflect and measure the electric field strength in an alternating electric field; but in a constant electric field, because the induced charge will decrease or disappear with time, the measurement result is not accurate. Does not reflect constant electric field strength values well
Therefore, compared with some shortcomings of mechanical electric field meters, electronic space electric field strength measuring instruments realized by charge induction can be widely used in industry, meteorology, education and other fields, but there are also certain defects.
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Embodiment 1
[0051] Such as Figure 4 , Figure 5 As shown, a kind of MEMS space electric field intensity sensor provided by the present invention includes MEMS chip 3, and two groups of rotating first electrostatic field micromotor 1 and second electrostatic field micromotor 2 are arranged in MEMS chip 3, and described The first electrostatic field micromotor 1 is an active drive motor that ensures that the load will generate electrostatic force after applying a voltage between its two plates, and the electrostatic force generated in the first electrostatic field micromotor 1 will make the first electrostatic force The pole plate rotation structure in the field micromotor 1, the second electrostatic field micromotor 2 is a passive drive motor that does not apply voltage between two parallel pole plates, and can be driven to rotate when the active drive motor works. The passive drive motor includes a rotor 4 made of metal blades with more than one hole and a stator 5 with the same structu...
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The invention discloses an MEMS space electric field intensity sensor, and a measuring system and method. The MEMS space electric field intensity sensor comprises an MEMS chip, two groups of first electrostatic field micromotors and second electrostatic field micromotors are arranged in the MEMS chip, the first electrostatic field micromotor is an active driving motor, an electrostatic force generated in the first electrostatic field micromotor causes a polar plate in the first electrostatic field micromotor to rotate, the second electrostatic field micromotor is a passive driving motor, the passive driving motor comprises a group of rotors composed of metal blades provided with one or more holes and stators having the same structure as the rotors, the metal blades on the stators are induction pieces capable of acquiring the electric field quantity in the space when the metal blades are exposed to the outside, the rotors and the stators cooperate to ensure that the induction piece shield the electric field in different time periods, thereby ensuring that the electrostatic field in the air is continuously shielded, different amounts of charges are generated in the exposure process,an alternating signal is formed at last, and the alternating signal is detected to serve as a signal value for detecting the space electric field intensity of the sensor.
Description
technical field [0001] The invention relates to the technical field of space electric field strength measurement, in particular to a MEMS space electric field strength sensor and a measurement system and method. Background technique [0002] Space electric field or atmospheric electric field, also known as natural electric field, is a basic physical parameter in the earth's environment. Changes in space electric field have a great impact on various phenomena in the natural environment, the growth of animals and plants, and even human activities. . Mastering the changing law of the space electric field is of great significance to improving human production and life. [0003] Space electric field is ubiquitous in the environment, and lightning is the most common space electric field discharge phenomenon in nature. On the one hand, lightning activities maintain the electrical balance of the overall environment of the earth. On the other hand, increasingly frequent lightning a...
Claims
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IPC IPC(8): G01R29/12
Inventor 赵青
Owner 赵青