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A kind of infrared focal plane array detector with dlc protective film and its preparation method

An infrared focal plane and array detector technology, applied in the field of infrared focal plane array, can solve problems such as poor picture quality, increased production costs, and reduced product service life

Active Publication Date: 2020-11-03
YANTAI RAYTRON TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, although the commonly used infrared anti-reflection coatings (such as ZnSe, ZnS, etc.) have excellent anti-reflection properties, their mechanical strength is low, and they are easy to be used in the production of detector vacuum sealing windows (especially in the assembly and debugging stages of components and cores). ) and the process of use (infrared focal plane array detectors are mostly used in extreme environments) to form scratches, wear or corrosion, which may cause damage to the anti-reflection coating of the window and reduce the transmittance of infrared radiation, which will further lead to a decrease in the performance of the detector or a decrease in the image quality. The quality deteriorates, which will lead to the failure of the detector components, increase the production cost and reduce the service life of the product

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  • A kind of infrared focal plane array detector with dlc protective film and its preparation method
  • A kind of infrared focal plane array detector with dlc protective film and its preparation method
  • A kind of infrared focal plane array detector with dlc protective film and its preparation method

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preparation example Construction

[0029] The invention provides a method for preparing an infrared focal plane array detector with a DLC protective film, comprising the following steps:

[0030] A) cleaning the window of the infrared focal plane array detector with acetone and working solution in sequence;

[0031] B) the window of the cleaned infrared focal plane array detector is fed into argon gas under vacuum conditions to perform radio frequency plasma cleaning;

[0032] C) feed carbon source gas again, adopt radio frequency plasma enhanced chemical vapor deposition method to deposit DLC protective film on the surface of the window of infrared focal plane array detector, obtain the infrared focal plane array detector with DLC protective film;

[0033] The radio frequency power of the step C) is 100-2500W, and the vacuum degree of the step C) is 3×10 -3 ~3×10 - 5 Pa.

[0034] The infrared focal plane array detector absorbs infrared waves to form images. In the terminal use scene, the detector will be e...

Embodiment 1

[0053] Clean the substrate: Use acetone to clean under ultrasonic for 5 minutes to remove surface oil, then use acetone working solution to clean under ultrasonic for 5 minutes, and then rinse repeatedly with deionized water for 10 minutes to remove surface impurities. Spin dry in a dryer, and immediately place the washed window on the vacuum chamber plate and vacuum it.

[0054] Deposit DLC film: When the vacuum degree reaches the set value of 0.0013Pa, argon gas is introduced, the flow rate of argon gas is 30Sccm, and the RF power is adjusted to 300W for argon ion cleaning.

[0055] And then into the carbon source gas CH 4 , set the RF power to 300W, cavity temperature to 200°C, substrate bias to 250v, vacuum degree to 3×10 -3 Pa, carbon source gas flow rate 60 sccm, start to deposit DLC film.

[0056] After the deposition is completed, turn off the radio frequency power supply, stop the introduction of carbon source gas, increase the flow rate of argon gas, release the va...

Embodiment 2

[0058] Clean the substrate: Use acetone to clean under ultrasonic for 10 minutes to remove surface oil, then use acetone working solution to clean under ultrasonic for 20 minutes, and then rinse repeatedly with deionized water for 10 minutes to remove surface impurities. Spin dry in a dryer, and immediately place the washed window on the vacuum chamber plate and vacuum it.

[0059] Deposit DLC film: When the vacuum degree reaches the set value of 0.13Pa, argon gas is introduced, the flow rate of argon gas is 90Sccm, and the RF power is adjusted to 300W for argon ion cleaning.

[0060] And then into the carbon source gas CH 4 , set the RF power to 300W, cavity temperature to 175°C, substrate bias voltage, vacuum degree to 5×10 -4 Pa, carbon source gas flow rate 40 sccm, start to deposit DLC film.

[0061] After the deposition is completed, turn off the radio frequency power supply, stop the introduction of carbon source gas, adjust the flow rate of argon gas, release the vacu...

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Abstract

The invention provides a preparation method for an infrared focal plane array detector with a DLC protection film. The method comprises the following steps: A) the window of the infrared focal plane array detector is cleaned by adopting acetone and a working fluid sequentially; B) argon is supplied to the cleaned window of the infrared focal plane array detector in a vacuum condition, and radio frequency plasma cleaning is carried out; C) a carbon source gas is then supplied, a radio frequency plasma enhanced chemical vapor deposition method is adopted to deposit a DLC protection film on the surface of the window of the infrared focal plane array detector, and the infrared focal plane array detector with the DLC protection film is obtained, wherein the radio frequency power in the step C)is 100 to 2500 W, and the vacuum degree in the step C) is 3*10<-3> to 3*10<-5> Pa. The invention also provides an infrared focal plane array detector with a DLC protection film.

Description

technical field [0001] The invention belongs to the technical field of infrared focal plane arrays, in particular to an infrared focal plane array detector with a DLC protective film and a preparation method thereof. Background technique [0002] Since entering the 21st century, the development of infrared thermal imaging technology has gone through more than 30 years, and its development has developed from the original mechanical scanning mechanism to the current all-solid miniaturized full electronic scanning staring camera, especially the uncooled technology The development of infrared thermal imaging technology has expanded from long-term main military purposes to such as industrial detection and temperature control, law enforcement and anti-narcotics, safety precautions, medical and health care, remote sensing, equipment pre-fault diagnosis and maintenance, sea rescue, astronomical detection, vehicles, flying chess And the driver of the ship is also a broad civilian fie...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J5/20
Inventor 陈文礼战毅孙俊杰孙传彬张磊
Owner YANTAI RAYTRON TECH
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