Vacuum magnetron sputtering coating production line for arc-shaped glass

Abstract

The invention discloses a vacuum magnetron sputtering coating production line for arc-shaped glass. The production line comprises a loading area, an inlet cavity, an inlet buffer cavity, an inlet conveying cavity, a sputtering cavity, an outlet conveying cavity, an outlet buffer cavity, an outlet cavity, a quality inspection cavity and an unloading area which are connected in sequence, transmission tables connected in sequence are arranged in the loading area, the inlet cavity, the inlet buffer cavity, the inlet conveying cavity, the sputtering cavity, the outlet conveying cavity, the outlet buffer cavity, the outlet cavity and the unloading area, a coating quality inspection table and a quality inspection system are arranged in the quality inspection cavity, and the transmission table inthe outlet cavity is connected with the coating quality inspection table. The vacuum magnetron sputtering coating production line for arc-shaped glass provided by the invention can realize large-batchand low-cost production of various coatings, and is high in sputtering deposition rate, high in process universality and particularly suitable for large-scale industrial production.

Description

technical field [0001] The invention relates to a vacuum magnetron sputtering coating production line for curved glass, belonging to the technical field of vacuum coating. Background technique [0002] Glass is an important building material. With the continuous improvement of decorative requirements for buildings, the use of glass in the construction industry is also increasing. However, when people choose glass doors and windows for buildings today, in addition to considering their aesthetic and appearance features, they pay more attention to issues such as thermal control, cooling costs, and the comfortable balance of internal sunlight projection. This makes the upstart in the coated glass family - Low-E glass stand out and become the focus of attention. [0003] Low-E glass, also known as low-emissivity glass, is a film system product composed of multiple layers of metal or other compounds coated on the glass surface. Its coating layer has the characteristics of high t...

AI Technical Summary

Problems solved by technology

Therefore, these production lines cannot meet the requirements for coating LOW-E glass

[0018] With the rapid development of coating technology in the field of vacuum coating, the requirements for coating products are getting higher and higher, so more and more improvements have occurred in the coating production line, and the requirements of the production line have increased accordingly. The overall stability of the existing technology coating production line Sexuality and coating uniformity, low production efficiency and high equipment cost

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