Fractional order electrostatic driven micro electro mechanical system control system with hysteresis characteristic

A technology of micro-electromechanical systems and hysteresis characteristics, applied in adaptive control, general control systems, control/regulation systems, etc., can solve problems such as poor accuracy of first-order filters

Active Publication Date: 2019-07-09
GUIZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But the accuracy of the first-order filter is

Method used

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  • Fractional order electrostatic driven micro electro mechanical system control system with hysteresis characteristic
  • Fractional order electrostatic driven micro electro mechanical system control system with hysteresis characteristic
  • Fractional order electrostatic driven micro electro mechanical system control system with hysteresis characteristic

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Embodiment

[0114] Embodiment A kind of fractional-order electrostatic drive MEMS control method with hysteresis characteristic, comprises the following steps:

[0115] a. Add a control input with hysteresis characteristics to the control input of the fractional-order electrostatic drive MEMS, and establish a mathematical model of the fractional-order electrostatic drive MEMS:

[0116]

[0117] in

[0118]

[0119] m e ,w and Fex Represent the effective mass, damping coefficient and driving force of the resonator, k 1 and k 3 Indicates the linear and cubic mechanical stiffness, C 0 Indicates the capacitance of the parallel plate actuator, V AC Indicates AC voltage, V DC Indicates the bias voltage, ω indicates the frequency of the AC voltage, ω 0 Indicates the natural frequency, u indicates the control input with hysteresis characteristics, x 1 and x 2 represent the beam displacement and velocity, respectively, C and α represent the Caputo definition and fractional order va...

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Abstract

The invention discloses a fractional order characteristic driven micro electro mechanical system (MEMS) control method. The control method comprises the following steps: under the condition of considering the input hysteresis characteristic, establishing a mathematical model of the MEMS, by considering the unmeasurable variable, time-varying lagging item, uncertainty and the output constraint thereof of the system, disclosing a chaotic oscillation phenomenon of the MEMS, and constructing time-varying delay in a compensation system state through Lyapunov-Krasovskii function, and proposing a self-adaptive stabilization control scheme for fusing an extension state observer, a Chebyshev neural network, a tangent baffier function and a tracking differentiator in a frame of the backstepping. Thecontrol method has the following effects of accelerating the solving speed, improving the system transient and steady-state performance, broadening the limitation of a physica sensor, reducing the computation workload, simplifying the controller design, cancelling the requirements on the primary function center and width, reducing the dependence on the precise model, improving the precision of atraditional first-order low-pass filter, overcoming an explosion problem of the differential item and guaranteeing that the output constraint condition cannot be violated.

Description

technical field [0001] The invention relates to a fractional-order electrostatic drive micro-electromechanical system, in particular to a control method for a fractional-order electrostatic drive micro-electromechanical system with hysteresis characteristics. Background technique [0002] At present, electrostatically driven microelectromechanical systems have been developed rapidly. Due to the broad application prospects in the fields of filtering, valves, electric micro-actuators and probe microscopes, it is very meaningful to study electrostatically driven MEMS, and some researchers have also made some useful explorations. As the requirements for system performance become more and more stringent, its sustainable development is facing challenges. Adverse effects such as chaotic oscillations, input hysteresis, time lag, model uncertainty, unmeasurable states, and output constraints have become a thorny issue that can lead to the breakdown of the performance of electrostati...

Claims

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Application Information

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IPC IPC(8): G05B13/04
CPCG05B13/042G05B13/027
Inventor 罗绍华赵乐张钧星李少波
Owner GUIZHOU UNIV
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