Two-way rapid thermal dissipation device of high-intensity magnetic field probe station

Abstract

The invention discloses a two-way rapid thermal dissipation device of a high-intensity magnetic field probe station. The two-way rapid thermal dissipation device comprises two probe racks, the upper ends of the two probe racks are jointly connected with an installing table, a vertical test probe is arranged at the geometric center of the installing table, the bottom ends of the two probe racks arejointly and fixedly connected with a thermal dissipation base, and two thermal dissipation centers are arranged at the upper end of the thermal dissipation base and located between the two probe racks. Excess heat is taken away through cooperation of the thermal dissipation base and air thermal dissipation, the temperature of a coil is greatly reduced through water cooling thermal dissipation ofthe two thermal dissipation centers, and through cooperation of the thermal dissipation base and the thermal dissipation centers, the thermal dissipation efficiency of the probe station is greatly improved under the condition that the test precision of the probe station is guaranteed, and energy consumption of a water cooling box is effectively reduced.

Description

Technical field [0001] The invention relates to the technical field of a strong magnetic field probe station, in particular to a dual-channel rapid heat dissipation device for a strong magnetic field probe station. Background technique [0002] The magnetic field probe station can be used to test chips, wafers, packaging devices, etc. through DC or low-frequency AC signals. It is widely used in the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science and biology Medicine and other fields. The magnetic field probe station is made of non-magnetic materials. The three-dimensional magnetic field probe station uses three pairs of Helmholtz-like coils placed orthogonally to generate a spatial three-dimensional magnetic field. The coil adopts a water-cooled structure and is equipped with a coil overheating protection device. Time stable work. The output current in each dimension is controlled by software or the front panel of the p...

AI Technical Summary

Problems solved by technology

However, the current water-cooled heat dissipation requires the use of cold boxes for cooling, which has low heat dissipation efficiency and high energy consumption.

At present, an efficient cooling device for magnetic field probe stations has not yet appeared, and the market urgently needs a high-efficiency cooling device for probe stations to solve the problems of low cooling efficiency and high energy consumption.

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