A linear displacement measuring device

Abstract

The invention discloses a linear displacement measuring device. The emitting surface of the light generating part and the receiving surface of the light imaging part are in the same plane, and the measuring part has at least a gap with respect to the plane where the emitting surface of the light generating part and the receiving surface of the light imaging part are located. The angle is a preset surface with a preset angle, and the measuring part can be displaced along the direction in which the light generating part and the light imaging part are arranged; the light generating part is used to emit light to the preset surface of the measuring part, and the first converging part is used to collect The light reflected back by the preset surface of the part and converges the light to the light imaging part, and the light imaging part is used to receive the light and form an image; Calculate the displacement of the measuring part based on the distance from the central axis of the part, the focal length of the first converging part and the distance from the central axis of the light imaging part to the central axis of the light generating part. Compared with the prior art, the linear displacement measuring device has simpler manufacturing process, lower production cost, and simpler processing circuit.

Description

technical field [0001] The invention relates to the technical field of displacement measurement, in particular to a linear displacement measurement device. Background technique [0002] At present, the tool used to precisely measure the displacement of objects on the machine tool is the grating scale displacement sensor, referred to as the grating scale, which mainly includes two types: incremental and absolute. Since the absolute grating ruler does not need to search for the reference origin, the position can be measured any time the power is re-energized after the power is turned off, and there is no need to return to zero, and the measurement accuracy is high, the anti-interference ability is strong, the stability is high, and the absolute coding range Large, it can measure a large range of linear displacement, and can also perform nonlinear correction, so the absolute grating scale is used more and more widely in industry as a displacement measurement tool. [0003] The...

AI Technical Summary

Problems solved by technology

[0003] The production method of the absolute grating scale uses photolithography, which is not only complicated in processing procedures, but also low in efficiency, and the production cost is also very expensive.

In addition, when measuring, because the absolute code channel with absolute position information and the incremental code channel used to generate subdivided position information are used to improve the measurement accuracy, so that a lot of reference signals are required to receive the incident reference signal of the incremental code channel. The photoelectric receiving element makes the circuit more complex, and it needs to average in the signal processing process to eliminate noise, and the circuit processing signal is more difficult

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