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A Method of Using Space Carrier Frequency Phase Shift Algorithm for Wavefront Slope Demodulation of Four-Wave Transverse Shearing Interferometer

A technology of transverse shearing and wavefront slope, applied in instruments, scientific instruments, optical radiation measurement, etc., can solve the problems such as the influence of the processing result accuracy and the large amount of algorithm calculation, and achieve the speed of recovery, low calculation amount, and edge error. small effect

Active Publication Date: 2021-09-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] The traditional four-wave transverse shearing interferometer demodulates the phase of interference fringes using the FFT method, but due to the influence of factors such as edge effects, spectrum truncation, and spectral resolution limitations in the FFT method, the algorithm has a large amount of calculation and the processing results Accuracy suffers

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  • A Method of Using Space Carrier Frequency Phase Shift Algorithm for Wavefront Slope Demodulation of Four-Wave Transverse Shearing Interferometer
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  • A Method of Using Space Carrier Frequency Phase Shift Algorithm for Wavefront Slope Demodulation of Four-Wave Transverse Shearing Interferometer

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Embodiment Construction

[0036] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0037] The present invention uses a spatial carrier frequency phase-shift algorithm for demodulating the wavefront slope of a four-wave transverse shearing interferometer, such as figure 1 The schematic diagram of the four-wave transverse shearing interferometer system is shown. The light to be measured is incident on the two-dimensional complex amplitude grating and diffracted by the grating. The sensor positions are misaligned with each other and superimposed coherently, forming interference fringes. The optical path difference information of the measured light can be recovered by using the interference fringes collected by the image sensor.

[0038] Two-dimensional complex amplitude grating (such as figure 2 shown), used to generate four beams of first-order diffracted light. The grating is composed of an amplitude grating and a phase g...

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Abstract

The invention relates to a method for demodulating the wavefront slope of a four-wave transverse shearing interferometer using a space carrier frequency phase shift algorithm, which belongs to the field of optical detection. In this method, the spatial carrier frequency phase shift algorithm is used to demodulate the wavefront slope of the four-wave transverse shearing interferometer, so as to finally realize the full-aperture, high-precision dynamic wavefront measurement. Specifically, by controlling the relationship between the grating period and the pixel size of the image sensor, the phase shift between adjacent pixels of the carrier stripe is controlled, and finally an appropriate phase shift algorithm is selected to realize the demodulation of the wavefront slope. Compared with the traditional four-wave transverse shearing interferometer using the Fast Fourier Transform (FFT) method to demodulate the wavefront slope, the calculation process of this method is simple, and there is no spectrum truncation and edge effects involved in the FFT method. Realize high-precision full-aperture dynamic wavefront measurement.

Description

technical field [0001] The invention belongs to the field of advanced optical manufacturing and detection, and in particular relates to a method for demodulating the wave front slope of a four-wave transverse shearing interferometer using a space carrier frequency phase shift algorithm. Background technique [0002] The interferometer is a high-precision, high-sensitivity measuring and testing instrument with the wavelength of light as the unit of measurement. It is widely used in optical measurement. Interference fringes are the loci of points with the same optical path difference in the interference field of the interferometer. According to the shape, movement, and density of the interference fringes, the optical path difference information of the measured light can be obtained by demodulation. [0003] The four-wave transverse shearing interferometer is a grating-type transverse shearing interferometer proposed by French scientist Jerome Primo in 2000. The light to be me...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01J9/02
CPCG01J9/0215
Inventor 陈小君刘峰伟吴永前闫峰涛赵彦肖向海徐燕张娟
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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