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Exploding foil integrated chip comprising energetic flyer

A technology of integrated chips and explosive foils, applied in the field of miniature low-energy ignition or detonation devices, can solve the problems of limited weapon systems, achieve the effects of reducing preparation costs, reducing ignition energy, and enhancing ignition or detonation effects

Inactive Publication Date: 2019-08-16
NANJING UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The ignition (ignition or detonation) energy of the current explosive foil integrated chip is relatively high, but the energy provided by the weapon system (such as solid rocket motor or missile fuze, etc.) is extremely limited, so how to reduce the ignition energy of the explosive foil integrated chip will become a research hotspot in the future

Method used

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  • Exploding foil integrated chip comprising energetic flyer
  • Exploding foil integrated chip comprising energetic flyer
  • Exploding foil integrated chip comprising energetic flyer

Examples

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Embodiment 1

[0031] In this implementation case, an explosive foil detonation system is designed on the basis of the explosive foil integrated chip unit, combined with image 3 and Figure 4, including the following steps NOTE: image 3 The left and right pictures in a-3f are the front view and top view of the manufacturing process, respectively:

[0032] first step, see image 3 a, for 50.8mm long x 50.8mm wide x 0.86mm high Al 2 o 3 The surface of the ceramic substrate 1 is cleaned.

[0033] The second step, see image 3 b, Al metal layer is deposited on the surface of ceramic base substrate 1 by photolithography, lift-off process and magnetron sputtering process to form pad 2, transition region 3 and bridge foil 4. The relevant dimensions are: the width of pad 2 is 7.5mm; the distance from bridge foil 4 to pad 2 is about 5mm; the size of bridge foil is 0.3mm×0.3mm×3.6μm; The transition area 3 is connected; in order to facilitate welding and conduction, a 100nm Au layer is deposited...

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Abstract

The invention discloses an exploding foil integrated chip comprising an energetic flyer. The exploding foil integrated chip comprises a substrate, an exploding foil, the energetic flyer, an acceleration chamber and an agent. A bonding pad, a transition region and an exploding bridge foil are arranged on the substrate. The bonding pad is connected with the exploding bridge foil through the transition region. The substrate is used as a reflective back plate of the integrated chip, so that plasma generated by electrical explosion of the exploding bridge foil is enabled to move upwards, shear polymer flyers and push energetic films deposited on the surfaces of the polymer flyers to move. Compared with the prior art, an MEMS process is adopted by the preparation process, an exploding foil detonation system is higher in integration degree and smaller in size, the product consistency is improved, and the preparation cost is reduced; the energetic flyer contains metal, metal does not need to be additionally deposited, and testing of the speed of the flyer is facilitated; and an energetic flyer is adopted, ignition or the detonation effect can be enhanced through the coupling effect of impact and heat, and the ignition energy of the exploding foil detonation system is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of miniature low-energy ignition or detonation devices, in particular to an explosive foil integrated chip containing energetic flyers and a preparation method thereof. Background technique [0002] The concept of Exploding Foil Initiator system (EFIs) was proposed by Lawrence Livermore Laboratory in the United States in the 1960s. It belongs to the in-line safety ignition and detonation system, and its composition includes a pulse power unit and an exploding foil initiation unit. . The former mainly includes high-voltage power supply, capacitors, high-voltage switches, flat cables and control circuits, etc., which provide the energy required for metal electric explosion for the explosive foil initiation unit; the latter mainly includes substrates, explosive bridge foils, flyers, accelerating chambers and agents. Wait. Specifically, the short-pulse high current from the pulse power unit makes the explosive...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F42C19/08F42B3/12
CPCF42B3/121F42C19/0819
Inventor 朱朋杨智付帅徐聪陈楷覃新张秋汪柯叶迎华沈瑞琪
Owner NANJING UNIV OF SCI & TECH
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