A mechanism for automatically peeling off a mask from a jig and its working method

Abstract

The invention relates to a mechanism for automatically peeling off a mask by a jig and its working method. The jig is equipped with two masks that are attracted by magnets; it is characterized in that it includes a stripping mechanism, a driving mechanism, and a positioning mechanism , a disassembly mechanism, a feeding mechanism and a pressing mechanism; the jig is installed in the positioning mechanism; the pressing mechanism presses the jig; the disassembly mechanism is inserted into the positioning mechanism to absorb the The magnet of the jig; the stripping mechanism absorbs the mask plate under negative pressure; the driving mechanism drives the stripping mechanism to move the mask plate into the discharging mechanism. The problems caused by the existing solutions are solved, such as the need to employ a large amount of labor force, uncontrollable stripping quality, high scrapping rate, low efficiency of stripping the mask plate, increasing the manufacturing cost of the mask plate, and the like.

Description

technical field [0001] The invention relates to a peeling mechanism, in particular to a mechanism for automatically peeling off a mask by a jig and a working method thereof. Background technique [0002] Generally, masks are widely used in the semiconductor industry. In the process of semiconductor manufacturing, part of it is a process from layout to wafer manufacturing, that is, photomask manufacturing. This part is the key part of the process connection, the most expensive part in the process, and one of the bottlenecks that restrict the minimum line width. Mask technology plays an important role in the chip industry, circuit board industry and display industry. The mask process will inevitably use a mask. The quality of the mask plate manufacturing will directly affect the quality of the subsequent mask process. [0003] In the existing solutions, there is no special device for stripping the mask in the jig, but a manual stripping method is used. Use tweezers to tea...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies of the prior art, the present invention discloses a mechanism and working method for automatically stripping a mask from a jig to solve the problem of employing a large amount of labor, uncontrollable stripping quality, high scrapping rate, stripping The low efficiency of the mask plate and the increase of the manufacturing cost of the mask plate, etc.

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