Three-dimensional imaging method, device and storage medium based on active light of various spectra

Abstract

The invention discloses a three-dimensional imaging method and device of active light based on multiple spectra and a storage medium. According to the scheme, a tested object is illuminated through imaging light sources with different spectra respectively, and imaging is performed on the tested object to obtain an image sequence; a micro-image / pixel is determined at the same location on each image, and all the micro-images / pixels form a micro-image set / pixel sequence; the clearest micro-image in the micro-image set or the pixel with the maximum edge sharpness in the pixel sequence is determined, and the spectrum corresponding to the image, where the clearest micro-image or the pixel with the maximum edge sharpness is located, is a target spectrum; a target height corresponding to the target spectrum is determined according to the target spectrum and an H-G curve acquired in advance, wherein the target height is the height of point locations, corresponding to the micro-mages / pixels, onthe tested object, and the H-G curve expresses a corresponding relation between each spectrum and the height of the tested object; and a 3D image of the tested object is determined according to the target height and the point locations, corresponding to the micro-images / pixels, on the tested object.

Description

technical field [0001] The present application relates to the technical field of optical imaging, in particular to a three-dimensional imaging method, device and storage medium based on active light of various spectra. Background technique [0002] For the measurement of object surface contours, such as 3D glass, lenses, printed circuit board (printed circuit board, PCB) solder joints, etc., in the prior art, common measurement methods include probe method, white light interferometry and confocal measurement method . Taking the probe method as an example, its principle may include scanning the contour shape of the surface of the object according to the contact of the probe on the surface. However, the contact measurement method of the probe method has the risk of scratching the surface of the object, and the wear of the probe will affect the measurement accuracy; while the white light interferometry is a non-contact optical measurement method, although it avoids the problem...

AI Technical Summary

Problems solved by technology

[0005] Based on this, in order to solve the technical problem that it is difficult to achieve high-precision contour measurement in the prior art, and when facing highly inclined smooth surface structures or samples of different materials, a large error will occur, a method based on multiple A three-dimensional imaging method based on spectral active light

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