Inductance type pressure sensor, manufacturing method and application thereof

A technology of a pressure sensor and a manufacturing method, applied in the sensor field, can solve the problems of complex data acquisition system, limited application range, difficult wearable devices, etc., and achieve the effects of improving sensitivity, increasing magnetic permeability, and improving self-inductance

Inactive Publication Date: 2019-09-17
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, domestic inductive sensors are mostly made of traditional rigid materials, and their application range is limited to traditional industrial fields, and there are problems such as insufficient sensitivity in the low strain range, making it difficult to apply to the field of wearable devices
In addition, the accuracy of the inductive sensor depends largely on the subsequent data acquisition system, and the data acquisition system of the inductive sensor is relatively complicated, and it is difficult to avoid problems such as low resolution

Method used

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  • Inductance type pressure sensor, manufacturing method and application thereof
  • Inductance type pressure sensor, manufacturing method and application thereof
  • Inductance type pressure sensor, manufacturing method and application thereof

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Embodiment Construction

[0035] The present invention will be further described below in conjunction with the drawings. The following embodiments are only used to illustrate the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.

[0036] figure 1 The actual photo of the 4×4 sensor array is shown. The sensor array can be bent freely, which demonstrates the high flexibility of the array. figure 2 Shows a schematic cross-sectional view of one unit sensor in the array. The sensor is composed of a planar spiral inductor on the bottom layer, a flexible wave-absorbing material on the top layer, and an elastic pillar in the middle.

[0037] (1) Working principle

[0038] When an AC signal is input to the coil, a magnetic field will be generated inside the coil. Since the magnetic permeability of the top ferrite film is much greater than the vacuum magnetic permeability (μ 0 ), it will shield the magnetic field generated by the pla...

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Abstract

The invention discloses an inductance type pressure sensor, a manufacturing method and application thereof. The inductance type pressure sensor comprises a plane inductor, a ferrite film, an elastic support pillar and a flexible cover film, wherein the ferrite film is adhered into the flexible cover film, and is positioned between the plane inductor and the flexible cover film; and the elastic support pillar is supported between the plane inductor and the flexible cover film, so that an air gap exists between the ferrite film and the plane inductor. The inductance type pressure sensor has the characteristics of high sensitivity, short response time, high stability and high repeatability.

Description

Technical field [0001] The invention relates to an inductive pressure sensor and a manufacturing method and application thereof, belonging to the technical field of sensors. Background technique [0002] Inductive sensor is a kind of sensor based on electromagnetic induction, using the change of magnetic circuit and magnetoresistance to further cause the change of coil self-inductance or mutual inductance, so as to realize non-electricity measurement. Inductive sensors have the advantages of high resolution, long service life, good linearity, high stability, simple structure, and good anti-interference. They are widely used in displacement measurement, particle detection, health monitoring and other fields. At present, most domestic inductive sensors are made of traditional rigid materials, and their application range is limited to traditional industrial fields, and there are problems such as insufficient sensitivity in the low strain range, and it is difficult to apply to the fi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14
CPCG01L1/14
Inventor 陈新建聂宝清汤昕冉缪一辉
Owner SUZHOU UNIV
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