Quartz-vibration-beam-based sensitive structure of six-axis force sensor

Abstract

The invention discloses a quartz-vibration-beam-based sensitive structure of a six-axis force sensor. The sensitive structure comprises an outer ring, an outer ring fixation thread, a side beam, a strain beam, an inner ring, an inner ring fixation thread and a quartz vibration beam chip. The quartz vibration beam chip is a resonant force or displacement sensitive chip; and when the quartz vibration beam chip is stretched or compressed, the resonant frequency changes and the resonant frequency change amount is in direct proportion to the stretching or compression amount. Since the quartz vibration beam chip is used for measuring the bending deformation of the strain beam, the sensitivity of the sensor is improved substantially. Moreover, the design rigidity of the elastic body can be effectively improved and the stress deformation of the sensor can be reduced. The high positional accuracy and applicability can be provided for application of the six-axis force sensor in the robot field.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a sensitive structure of a six-axis force sensor based on a quartz vibrating beam. Background technique [0002] The six-axis force sensor is the core component of the force control of the robot end, and its performance is crucial to the force control effect of the robot. At present, the mainstream strain gauge six-axis force sensor adopts the cross beam structure. The bending deformation of the elastic beam is detected by the strain gauge, and the force and moment in the three directions are calculated by using the decoupling algorithm. [0003] Due to the restriction of the performance of the strain gauge, the sensitive range of the current six-axis force sensor only covers 4-5 orders of magnitude. Under the influence of the gravity of the end clamp, etc., the actual sensitive range is very limited. At the same time, in order to increase the output response, the design value o...

AI Technical Summary

Problems solved by technology

[0003] Due to the restriction of the performance of the strain gauge, the sensitive range of the current six-axis force sensor only covers 4-5 orders of magnitude. Under the influence of the gravity of the end clamp, etc., the actual sensitive range is very limited.

At the same time, in order to increase the output response, the design value of the strain gage six-axis force sensor's own stiffness is relatively small, on the one hand, its own deformation is relatively large, and on the other hand, it is prone to structural damage when subjected to overload impact

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