Quartz-vibration-beam-based sensitive structure of six-axis force sensor

A sensitive structure and sensor technology, applied in the field of sensors, can solve the problems of small stiffness design value, limited sensitive range and structural damage of strain gauge six-axis force sensor, and achieve good position accuracy and applicability, reliable long-term stability , nonlinear small effect

Inactive Publication Date: 2019-09-24
上海肇擎传感技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Due to the restriction of the performance of the strain gauge, the sensitive range of the current six-axis force sensor only covers 4-5 orders of magnitude. Under the influence of the gravity of the end clamp, etc., the actual sensitive range is very limited.
At the same time, in order to increase the output response, the design value of the strain gage six-axis force sensor's own stiffness is relatively small, on the one hand, its own deformation is relatively large, and on the other hand, it is prone to structural damage when subjected to overload impact

Method used

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  • Quartz-vibration-beam-based sensitive structure of six-axis force sensor
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  • Quartz-vibration-beam-based sensitive structure of six-axis force sensor

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Experimental program
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Effect test

Embodiment 1

[0025] Embodiment 1: The elastic body is an orthogonal cross beam type, including an outer ring 1, an outer ring fixing thread 2, an inner ring 5, an inner ring fixing thread 6, four orthogonally distributed side beams 301-304, four orthogonal Distributed strain beams 401-404. There are grooves on the four sides of the strain beam 4 . The quartz vibrating beam chip 7 is pasted on the central axis of the front and side of the strain beam 4, and the two ends straddle the both sides of the groove. The quartz vibrating beam chip 7 is connected to the detection circuit by gold wire welding or other means. In this embodiment, 4 groups of 16 quartz vibrating beam chips 7 in total are used to realize the detection effect (711-714 in the positive direction of x, 721-724 in the negative direction of y, 731-734 in the negative direction of x, and 741-744 in the positive direction of y).

[0026] Assuming that the outer ring 1 is fixed, the external force / moment is loaded on the inner r...

Embodiment 2

[0056] Compared with Embodiment 1, the elastic body in this embodiment has only three strain beams 4 that are 120° to each other, three groups of six pairs of twelve quartz beam chips 7, and output frequency difference signals of six chip pairs. By reducing the number of strain beams 4, the manufacturing cost is reduced. Although the three strain beams 4 are not distributed orthogonally and there is strong inter-dimensional coupling, the conversion relationship between the six-dimensional force and the six frequency difference signals can still be obtained through the decoupling algorithm.

[0057] The sensitive structure of the present invention, together with the shell of the sensor, the measuring circuit and the data processing circuit, constitutes a complete six-dimensional force sensor.

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Abstract

The invention discloses a quartz-vibration-beam-based sensitive structure of a six-axis force sensor. The sensitive structure comprises an outer ring, an outer ring fixation thread, a side beam, a strain beam, an inner ring, an inner ring fixation thread and a quartz vibration beam chip. The quartz vibration beam chip is a resonant force or displacement sensitive chip; and when the quartz vibration beam chip is stretched or compressed, the resonant frequency changes and the resonant frequency change amount is in direct proportion to the stretching or compression amount. Since the quartz vibration beam chip is used for measuring the bending deformation of the strain beam, the sensitivity of the sensor is improved substantially. Moreover, the design rigidity of the elastic body can be effectively improved and the stress deformation of the sensor can be reduced. The high positional accuracy and applicability can be provided for application of the six-axis force sensor in the robot field.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a sensitive structure of a six-axis force sensor based on a quartz vibrating beam. Background technique [0002] The six-axis force sensor is the core component of the force control of the robot end, and its performance is crucial to the force control effect of the robot. At present, the mainstream strain gauge six-axis force sensor adopts the cross beam structure. The bending deformation of the elastic beam is detected by the strain gauge, and the force and moment in the three directions are calculated by using the decoupling algorithm. [0003] Due to the restriction of the performance of the strain gauge, the sensitive range of the current six-axis force sensor only covers 4-5 orders of magnitude. Under the influence of the gravity of the end clamp, etc., the actual sensitive range is very limited. At the same time, in order to increase the output response, the design value o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L5/16
CPCG01L5/16
Inventor 杨军胡鸿
Owner 上海肇擎传感技术有限公司
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