Weak current measuring device of ATE system and measuring method

A technology of weak current and measuring devices, which is applied in the direction of measuring devices, measuring electrical variables, measuring electricity, etc., can solve the problems of complex circuit design, inability to widely apply weak current testing of ATE systems, and high cost, and achieve small size and low external interference , the effect of low power consumption

Pending Publication Date: 2019-09-24
BEIJING HUAFENG TEST & CONTROL TECH CO LTD
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the design of this circuit is more complicated and the cost is higher, so it cannot be widely used in the weak current test of ATE system

Method used

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  • Weak current measuring device of ATE system and measuring method
  • Weak current measuring device of ATE system and measuring method
  • Weak current measuring device of ATE system and measuring method

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Embodiment Construction

[0037] Refer below Figure 3 ~ Figure 8 The specific implementation of the weak current measuring device of the ATE system of the present invention will be described in detail.

[0038] Such as image 3In the shown first embodiment, the weak current measurement device of the ATE system provided by the present invention includes a V / I source and an I-V conversion circuit;

[0039] The I-V conversion circuit is used for current-voltage conversion, and its two measurement input terminals I+, I- are connected in series with the circuit under test. The I-V conversion circuit is connected to the V / I source through a Kelvin circuit, and the Kelvin circuit includes a connection V The Force H line and Sense H line connected to the positive pole of the / I source and the Force L line and Sense L line connected to the negative pole of the V / I source. The specific connection methods are:

[0040] The positive pole and the negative pole of the V / I source are respectively connected to the ...

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PUM

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Abstract

The invention provides a weak current measuring device of an ATE system and a measuring method. The measuring device comprises at least one group of I-V conversion circuits and a V/I source. The I-V conversion circuit is used to carry out current-to-voltage conversion, two measurement input ends are connected in series with a tested loop, and the I-V conversion circuits are connected to the V/I source through a Kelvin circuit. The V/I source is connected to positive and negative power supply terminals of the I-V conversion circuits through a Force H wire and a Force L wire of the Kelvin circuit so as to provide a work voltage. An output terminal of each I-V conversion circuit is connected through a Sense H wire of the Kelvin circuit, and an output voltage is measured. And a grounding terminal of each I-V conversion circuit is connected through a Sense L wire of the Kelvin circuit. The device has a simple structure, a small size and low power consumption, can be placed very close to a measured device and is not interfered by the outside world. And measurement accuracy is high.

Description

technical field [0001] The invention relates to the technical field of integrated circuit testing, in particular to a weak current measuring device and a measuring method for an ATE system. Background technique [0002] In circuit testing, the current or voltage at the load terminal can be tested respectively by connecting an ammeter in series or a voltmeter in parallel at the load terminal, such as figure 1 As shown, by connecting an ammeter in series in the circuit under test, it can be measured at V BIAS voltage flows through the load R L current. However, this test method is limited by the measurement accuracy of the ammeter, and cannot achieve high-precision weak current measurement, and the interference in the line will have a great impact on the tested current. [0003] When testing various DC parameters, the integrated circuit automatic test system (ATE) will provide a variety of voltage and current source meters (hereinafter referred to as V / I source) of differen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/28
CPCG01R31/2851
Inventor 周鹏孙衍翀佟宇
Owner BEIJING HUAFENG TEST & CONTROL TECH CO LTD
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