AlN-piezoelectric-film-based wireless passive surface acoustic wave high-temperature strain sensor

Abstract

The invention, which relates to the technical field of strain sensors, provides an AlN-piezoelectric-film-based wireless passive surface acoustic wave high-temperature strain sensor. A single-ended pair resonator based on a multi-layer composite structure is employed and calculation is performed based on the frequency difference of a high-temperature strain sensing chip and a temperature compensation chip, so that the temperature-induced interference is eliminated, the temperature compensation is realized, and the wireless passive measurement in a high temperature environment is realized. Thesensor comprises a high-temperature strain sensing chip, a temperature compensation chip and a sensor tube base; the high-temperature strain sensing chip and the temperature compensation chip are arranged on the sensor tube base; the SAW propagation direction of the high-temperature strain sensing chip is parallel to the length direction of the sensor tube base; and the SAW propagation direction of the temperature compensation chip is perpendicular to the SAW propagation direction of the high-temperature strain sensing chip. The AlN-piezoelectric-film-based wireless passive surface acoustic wave high-temperature strain sensor is suitable for the application process of the high-temperature environment strain sensor.

Description

【Technical field】 [0001] The invention relates to the technical field of strain sensors, in particular to a wireless passive surface acoustic wave high-temperature strain sensor based on an AlN piezoelectric film. 【Background technique】 [0002] In recent years, with the rapid development of the defense industry, high-temperature strain sensors are urgently needed in the fields of aerospace, automobiles, electric power, nuclear power, and petroleum and petrochemical industries. For example, accurate on-line monitoring of the strain of high-temperature components of aerospace vehicles is of great practical significance to ensure the precise operation of equipment and safe production. [0003] The resistance strain sensor uses the metal resistance wire to be subjected to external force to produce a corresponding change in strain, and the purpose of detecting the strain is obtained by measuring the resistance change of the sensor. Due to their small size, simple structure, and...

AI Technical Summary

Problems solved by technology

This type of sensor has excellent measurement performance, but its cost is high, the application is complex, and it is easily affected by non-measured physical quantities

Ordinary grating areas are easy to erase at high temperatures, and the reflectivity will decrease. The coating layer material (acrylate) cannot withstand high temperatures and is prone to carbonization, which makes the grating lose its sensing ability

Therefore, in general, it is difficult for optical fiber strain sensors to work stably in high temperature environments

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