Near-field ultrasonic cavitation and fluid shearing combined type micro-gear finishing machining device and machining method

Abstract

The invention belongs to the field of precision and ultra-precision machining, and particularly relates to a near-field ultrasonic cavitation and fluid shearing combined type micro-gear finishing machining device and a machining method. The near-field ultrasonic cavitation and fluid shearing combined type micro-gear finishing machining device comprises a near-field ultrasonic cavitation system, afluid shearing system and a polishing solution circulation system, wherein the near-field ultrasonic cavitation system comprises an ultrasonic generator, a piezoelectric transducer, an amplitude-change rod, an upper supporting disc, a lower supporting disc and a precise support, the ultrasonic generator is connected with the piezoelectric transducer through a wire, the piezoelectric transducer isconnected with the amplitude-change rod through a double-head stud, a flange plate used for being fixed to the precise support is arranged on the amplitude-change rod, the amplitude-change rod is connected with the upper supporting disc through a bolt, the lower supporting disc is arranged below the upper supporting disc, a micro-gear is arranged on the lower supporting disc, and the micro-gear isconnected with a clamp through a bolt. According to the near-field ultrasonic cavitation and fluid shearing combined type micro-gear finishing machining device and the machining method, cavitation bubbles and solid abrasive particles of a polishing solution can effectively clean a micro-groove structure interface, so that efficient, precise, green and flexible finishing machining of the micro-gear is realized.

Description

technical field [0001] The invention belongs to the field of precision and ultra-precision machining, and in particular relates to a fine gear finishing device and a machining method for near-field ultrasonic cavitation composite fluid shearing. Background technique [0002] As products are increasingly miniaturized, intelligent, and micro-sized, the finishing technology of micro-structured parts will become a potential development direction for the manufacture of micro-structured parts. Micro-groove structure parts with surface functions, such as micro-channels, micro-ribs, micro-slots, micro-pits, etc., make it difficult for traditional precision and ultra-precision machining methods to achieve ideal processing quality and processing efficiency. [0003] Micro gears are typical representatives of microstructure parts. Micro-gears with micro-groove structure characteristics are the main transmission and power components of cutting-edge technology products such as gyroscope...

AI Technical Summary

Problems solved by technology

At present, microstructure components mainly use traditional finishing methods such as polishing and deburring to improve their processing accuracy and reduce surface roughness. The efficiency and precision are low, and it is more difficult to guarantee the processing quality; although some non-traditional finishing methods such as ultrasonic cleaning and chemical processing have been proposed, the application is relatively limited

The patent (ZL2014

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