High beryllium copper continuous coating rolling composite material for photomultiplier and preparation method thereof
A technology of rolling composite materials and photoelectric multiplication, applied in metal material coating process, sputtering coating, vacuum evaporation coating, etc., can solve problems such as easy cracking, small strip size, and inability to form Sub-electron emission coefficient, improved utilization efficiency, and high production efficiency
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Embodiment 1
[0035] (a) Preprocessing
[0036] Select a C17300 beryllium copper strip with a thickness of 0.6mm as the base material, pickle it in dilute sulfuric acid with a concentration of 5% for 5 minutes to remove scale, rinse it with water, and then use mechanical polishing, and then ultrasonically clean and dry it in an absolute ethanol environment. ;
[0037] (b) Coating
[0038] Place the dried base material as the anode on the substrate table 1, then put the copper-beryllium master alloy with a weight fraction of 4wt.% into the target base 2 of the coating machine as the cathode, and pump out the target base 2 of the coating machine Vacuum to 10 -3 Pa, preheat the substrate to 600°C, use the argon ion generator to continuously bombard the target, the energy of the argon ion generator is 10MeV, at the same time, maintain the cathode rotation speed at 5r / min, control the current at 10A, and deposit for 20min to obtain a coating After stripping, carry out on-line quenching, the q...
Embodiment 2
[0048] (a) Preprocessing
[0049] Select a pure copper strip with a thickness of 2mm as the substrate, pickle it in dilute sulfuric acid with a concentration of 3% for 3 minutes to remove the scale, rinse it with water, and then use mechanical polishing, and then ultrasonically clean and dry it in an anhydrous ethanol environment for later use;
[0050] (b) Coating
[0051]Place the dried base material as the anode on the substrate table 1, then put the copper-beryllium master alloy with a weight fraction of 8wt.% into the target base 2 of the coating machine as the cathode, and pump out the target base 2 of the coating machine Vacuum to 10 -3 Pa, preheat the substrate to 780°C, use an argon ion generator to continuously bombard the target, the energy of the argon ion generator is 60MeV, at the same time, maintain the cathode rotation speed at 36r / min, control the current at 50A, and deposit for 55min to obtain a coating After stripping, carry out on-line quenching, the quen...
Embodiment 3
[0061] (a) Preprocessing
[0062] Select the C17300 beryllium copper strip as the base material, pickle it in 5% dilute sulfuric acid for 5 minutes to remove the scale, rinse it with water, use mechanical polishing, and ultrasonically clean and dry it in an anhydrous ethanol environment for later use;
[0063] (b) Coating
[0064] Place the dried base material as the anode on the substrate table 1, then put the copper-beryllium master alloy with a weight fraction of 10wt.% into the target base 2 of the coating machine as the cathode, and pump out the target base 2 of the coating machine Vacuum to 10 -3 Pa, preheat the substrate to 800°C, use the argon ion generator to continuously bombard the target, the energy of the argon ion generator is 100MeV, at the same time, maintain the cathode speed at 50r / min, control the current at 60A, and deposit for 60min to obtain a coating After stripping, carry out on-line quenching, the quenching temperature is 820°C, and the holding time ...
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