An automatic temperature regulation process
An automatic adjustment and process technology, applied in the self-melting liquid pulling method, single crystal growth, polycrystalline material growth and other directions, can solve the problems of long temperature stabilization time, prone to accidents, long working hours, etc. High safety and the effect of improving temperature stabilization working hours
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[0026] The present invention will be further described below in conjunction with specific examples.
[0027] The invention relates to an automatic temperature adjustment process, which is applied in the automatic temperature stabilization process of Czochralski single crystal. By simulating the manual temperature adjustment operation process, the automatic temperature adjustment can be carried out according to the temperature adjustment logic of manual temperature stabilization. On this basis, The temperature adjustment is more accurate, scientific and unified, and can realize the automatic, standardized and unmanned automatic process, avoiding the waste of working hours and the occurrence of abnormal accidents due to insufficient manual experience.
[0028] In the Czochralski single crystal process, temperature stabilization, seeding, shoulder release, shoulder rotation, equal diameter and finishing processes are carried out in sequence to achieve normal Czochralski single cry...
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