High speed line scan sensor and its calibration method
A calibration method and sensor technology, which can be applied to instruments, measuring devices, and optical devices, etc., can solve the problems of area scan camera shooting speed limitation and three-dimensional measurement limitation, and achieve the effects of compact structure, improved scanning speed, and low energy consumption.
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[0030] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0031] Such as figure 1 As shown, a high-speed line scan sensor proposed by the present invention includes a line camera 1 and a one-dimensional scanning vibrating mirror 2; the one-dimensional scanning vibrating mirror 2 preferably adopts a one-dimensional MEMS scanning vibrating mirror, and the volume is smaller; the one-dimensional scanning vibrating mirror Mirror 2 can control the brightness of the laser spot through coding;
[0032] The line array camera 1 and the one-dimensional scanning galvanometer 2 are set at a distance from the left and right; for example, the line array camera 1 and the one-dimensional scanning galvanometer 2 are fixed on a one-dimensional mobile platform; The laser receiving side of camera 1 is on the same side;
[0033] The one-dimensional scanning galvanometer 2 can emit a scanning laser line a within its scanning angle range, ...
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