Femtosecond laser closed-loop processing system

Abstract

The invention discloses femtosecond laser closed-loop processing system and method, and belongs to the field of femtosecond laser processing. The system comprises a femtosecond processing system, a femtosecond range-measurement system, a three-dimensional movement platform and a processor. The processing system and the range-measurement system share a part of components. The femtosecond processingsystem comprises a femtosecond laser, an opto-isolator, a first beam splitter and a microscope objective. The femtosecond range-measurement system comprises a femtosecond laser, an opto-isolator, a first beam splitter, a second beam splitter, a microscope objective, a first reference arm, a second reference arm, a coupling lens, an F-P filter and a spectrograph. An object to be processed is placed on the three-dimensional movement platform, and the processor controls the movement of the movement platform and analyzes information acquired by the spectrograph in the femtosecond range-measurement system, so that the height information of an object processing point is acquired and is further fed back to the femtosecond processing system, and closed-loop control is formed. The invention further provides the corresponding processing method. According to the system and the method provided by the invention can realize high-precision on-line feedback processing on workpieces.

Description

technical field [0001] The invention belongs to the field of femtosecond laser processing, and more specifically relates to a femtosecond laser closed-loop processing system. Background technique [0002] Femtosecond lasers have extremely short pulse durations, allowing femtosecond lasers to have extremely high intensity and peak power. Different from traditional laser processing, when femtosecond laser is used for processing, the interaction between laser and atoms, ions, free electrons and plasma is a nonlinear absorption process, which can realize ultra-fine processing. [0003] Compared with conventional laser processing, femtosecond laser fine processing has the advantages of extremely small heat-affected zone, extremely small processing scale, high processing efficiency, and can realize ultra-high-precision three-dimensional processing. [1] . Among them, the three-dimensional processing range of femtosecond laser can be as small as submicron or even nanometer level. ...

AI Technical Summary

Problems solved by technology

[0004] The traditional laser processing method is to process first and then inspect. The process efficiency is low, and the processing depth cannot be accurately obtained at the same time during the processing. In order to ensure accurate processing, it is necessary to repeatedly check offline and process online.

Once the processing exceeds the limit, it may also lead to product scrapping

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