High-boiling-point organic matter waste gas treatment device and treatment method thereof

Abstract

The present application relates to the field of exhaust gas treatment technology, and discloses a high-boiling-point organic matter waste gas treatment device and a treatment method thereof. The treatment device comprises a condensation treatment device, a depth filtration treatment device, a leaching treatment device and an exhaust fan, wherein the condensation treatment device is used for converting gaseous organic matters in high-boiling-point organic matter waste gas into liquid; the depth filtration treatment device communicates with the condensation treatment device and is used for treating the high-boiling-point organic matter exhaust gas treated by the condensation treatment device, and the depth filtration treatment device is used for filtering fine droplets having the diameter of0.1 [mu]m to 200 [mu]m; the leaching treatment device communicates with the depth filtration treatment device and is used for leaching the high-boiling-point organic matter waste gas treated by the depth filtration treatment device; and the exhaust fan is used for discharging high-boiling-point organic matter waste gas treated by the leaching treatment device. According to the high-boiling-pointorganic matter waste gas treatment device, environmental pollution is reduced, clean production is achieved, and the production cost is reduced.

Description

technical field [0001] The present application relates to the technical field of waste gas treatment, in particular to a high boiling point organic waste gas treatment equipment and treatment method thereof. Background technique [0002] At present, the mainstream products in the electronics industry are semiconductor chips and display devices. The stripping process of the photoresist in the production process requires the use of ethanolamine (MEA), dimethyl sulfoxide (DMSO), diethylene glycol butyl ether (BDG), N - Organic solvents such as methylpyrrolidone (NMP) are used as the stripping solution, and the boiling points of these organic solvents are: MEA, 170.5°C; DMSO, 189°C; BDG, 230.6°C; NMP, 203°C. The boiling points of the above-mentioned organic solvent stripping liquids are all between 150° C. and 250° C., so they all belong to high boiling point volatile organic compounds. In recent years, the high-boiling volatile organic compounds (VOCs) produced in the photores...

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Problems solved by technology

[0005] This application provides a high-boiling point organic waste gas treatment equipment and its treatment method, which can effectively solve the problem that a large number of fine mist droplets caused by condensation and leaching treatment of high-boiling point organic waste gas cannot be effectively removed, and then thoroughly treat photoresist stripping High-boiling-point organic substances produced during the production process to achieve the purpose of reducing air pollution and protecting the environment

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