Diffractive optical element, and structured light projection device
A diffractive optical element and structured light projection technology, applied in optical elements, optics, instruments, etc., can solve the problems of fine diffraction pattern changes, optical performance changes of diffractive optical elements, damage to eyes, etc., to reduce the impact.
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Embodiment 1
[0056] figure 1 A schematic cross-sectional view of an integrated optical module including Embodiment 1 of a diffractive optical element according to the present application is shown.
[0057] Such as figure 1 As shown, the integrated optical module is a structured light projection device 1 . The structured light projection device 1 includes a light source 20 , a collimator lens unit 30 and a diffractive optical unit 40 .
[0058] Light source 20 includes coherent or incoherent solid state light source emitters. figure 1 The light emitted by the light source 20 is schematically shown in solid lines. The light source 20 is mounted on a substrate 50 that provides mechanical and electrical properties. The light source 20 can be, for example, a vertical cavity surface emitting laser (VCSEL) or an edge emitting light source, such as a GaAs laser diode, which emits light parallel to the substrate 50 or perpendicular to the surface of the substrate 50 . In addition, the light so...
Embodiment 2
[0073] Refer to the following figure 2 Embodiment 2 of the diffractive optical element 41 of the present application will be described. For clarity, only a single diffractive optical element 41 is shown in the figures.
[0074] In order to more clearly describe the diffractive optical element 41 according to the present application, figure 2 shows the formation process of Embodiment 2 of the diffractive optical element 41 according to the present application, the process includes the following steps:
[0075] Step 1: Select a wafer 42, in this embodiment, the wafer 42 is made of glass.
[0076] For clarity, the Figure 2 to Figure 8 Only a portion of wafer 42 is shown in FIG. In actual processing, the wafer 42 actually comprises a periodic two-dimensional array of the portions shown.
[0077] The wafer 42 may be in a regular array pattern such as a square with side lengths ranging from 150mm to 200mm or any other suitable size. In addition, the wafer 42 may have a circ...
Embodiment 3
[0098] Refer to the following image 3 Embodiment 3 of the diffractive optical element 41 of the present application will be described. For clarity, only a single diffractive optical element 41 is shown in the figures.
[0099] In order to more clearly describe the diffractive optical element 41 according to the present application, image 3 The formation process of Embodiment 3 of the diffractive optical element 41 according to the present application is shown in .
[0100] The formation process of the diffractive optical element 41 described in Embodiment 3 is similar to the formation process of the diffractive optical element 41 described in Embodiment 1. For the sake of brevity, descriptions of steps similar to Embodiment 1 will be omitted.
[0101] In Embodiment 3, another wafer 71 is used in step 7 to be aligned with the wafer 42 of step 6 . The other wafer 71 is a flat wafer and has not been processed in Step 1 to Step 6 in Embodiment 1.
[0102] In step 9, before ...
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