A kind of ultrasonic transducer array probe

Abstract

The embodiment of the present invention discloses an ultrasonic transducer array probe, comprising: an ultrasonic transducer array structure, a casing and a first acoustic material; a prism composed of at least three ultrasonic transducer array structures is arranged inside the casing; the casing and The interstitial spaces between the ultrasonic transducer array structures are filled with a first acoustic material. In the embodiment of the present invention, the manufacturing difficulty of the ultrasonic transducer array probe is reduced by replacing the ring-shaped ultrasonic transducer array probe with a prismatic ultrasonic transducer array probe composed of at least three ultrasonic array structures. And because the ultrasonic transducer array probe is compatible with the widely used integrated circuit packaging process, the integration of application-specific integrated circuits and ultrasonic transducer array structures can be realized under the existing, mature and large-scale packaging process conditions. And high-precision interconnection, which in turn greatly improves the production efficiency of the ultrasonic transducer array probe.

Description

technical field [0001] Embodiments of the present invention relate to ultrasonic detection technology, and in particular to an ultrasonic transducer array probe. Background technique [0002] Ultrasonic testing has been widely used in various industrial and medical fields, such as oil pipeline testing, nuclear power plant water cooling pipe testing, cardiovascular disease and obstetrics and gynecological disease treatment and inspection. [0003] At present, both external and internal pipeline flaw detector structures are composed of annular ultrasonic transducer array probes. Ultrasonic transducer is a kind of energy conversion device, its function is to convert the input electric power into mechanical power (that is, ultrasonic wave) and then transmit it out. There are usually two ways to make a ring-shaped ultrasonic transducer array probe, specifically: one is to first make a plane linear array of ultrasonic transducers, and use a dicing machine to cut the piezoelectric...

AI Technical Summary

Problems solved by technology

Specifically: Since the difficulty of cutting on the cylindrical core is much greater than that of plane cutting, especially when the device size is very small, in order to ensure the cutting accuracy, the cutting knife needs to move along the circumference with very precise steps. Otherwise, the small piece of piezoelectric material cut out will be uneven, which will seriously affect the performance of the device

The above also increases the difficulty of making

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