Practical high-precision quadrant-detector (QD) Gaussian spot centroid positioning method
A four-quadrant detector and center-of-mass positioning technology, which is applied in the direction of using optical devices, instruments, and measuring devices, can solve problems related to the radius of the spot, and achieve high positioning accuracy, broad application prospects, practical value, and fast processing speed.
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[0043] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0044] see Figure 1-3 , a practical high-precision four-quadrant detector Gaussian spot centroid positioning method, including the following steps:
[0045] Step 1. Use the four-channel output photocurrent of the four-quadrant detector to calculate the solution value of the spot centroid in the x and y directions and Its calculation formula is:
[0046]
[0047]
[0048] In the formula, I A , I B , I C , I D are the photocurrents of the four qu...
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