Quartz capacitor type displacement sensor with angstrom-scale resolution level

Abstract

The invention relates to a quartz capacitor type displacement sensor with an angstrom-scale resolution level. The quartz capacitor type displacement sensor is technically characterized by comprising an upper fixed polar plate, a movable polar plate, a lower fixed polar plate, a plurality of spacers, an upper anti-stick ring, a lower anti-stick ring and a connection component; central through holesare formed in all the upper fixed polar plate, the movable polar plate and the lower fixed polar plate; gold membranes are plated on the lower surface of the upper fixed polar plate, the upper surface of the lower fixed polar plate, the upper and lower surfaces and outer sides of the movable polar plate; the upper fixed polar plate and the lower fixed polar plate are parallel to each other and overlapped with each other; the plurality of detachable spacers are arranged between the upper fixed polar plate and the lower fixed polar plate at equal intervals; the movable polar plate is movably installed between the upper fixed polar plate and the lower fixed polar plate on the inner sides of the spacers; the upper anti-stick ring and the lower anti-stick ring which are cylindrical in shape and provided with turnups at the tail parts are respectively fixedly installed on the central through holes of the upper fixed polar plate and the lower fixed polar plate; the connection component is installed in a cavity formed by the cylindrical through holes of the upper and lower anti-stick rings in a penetrating manner. According to the quartz capacitor type displacement sensor, the displacement resolving power can be improved, and the non-linear error of the capacitor can be reduced.

Description

technical field [0001] The invention belongs to the technical field of measurement and metering instruments, and relates to a capacitive displacement sensor, in particular to a sensor with angstrom (10 -10 m) level of resolution of the quartz capacitive displacement sensor. Background technique [0002] At present, the miniaturization of instruments and equipment is inevitable for the development of science and technology. With the rapid development of micron and nanotechnology, nanometer (10 -9 m), Amy (10 -10 The measurement of micro-displacement on the order of m) has become a technical problem that needs to be solved urgently. Since the diameter of atoms is at the Angstrom level, single-point contact measurement can no longer accurately measure the accuracy of the Angstrom-level size. Non-contact measurement mainly starts with electricity, magnetism, light, etc., and converts nanometer and angstrom-level displacements into changes in other signals. At present, the ma...

AI Technical Summary

Problems solved by technology

However, due to the characteristics of the capacitor itself, new problems have arisen in terms of material insulation, surface finish, nonlinear error, and stray capacitance.

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