Solar cell laminated passivation structure, preparation method thereof and cell
A solar cell and stacking technology, applied in the field of solar cells, can solve problems such as cell warping, achieve the effects of preventing warping, reducing surface stress, improving minority carrier life and conversion efficiency
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[0040] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings. Only this statement, the present invention appears or will appear in the text up, down, left, right, front, rear, inner, outer and other orientation terms, only based on the accompanying drawings of the present invention, which are not specific to the present invention limited.
[0041] see figure 1 , the present invention provides a solar cell passivation structure, which includes: a silicon wafer 1 and an aluminum oxide layer 2 arranged on the back of the silicon wafer in sequence, a mixed passivation layer 3 and a passivation layer 4; wherein, the aluminum oxide layer 2 is deposited by PECVD method; the mixed passivation layer 3 is formed by bombarding the aluminum oxide layer with plasma obtained by ionizing the hydrogen-containing material and the oxygen-co...
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