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Solar cell laminated passivation structure, preparation method thereof and cell

A solar cell and stacking technology, applied in the field of solar cells, can solve problems such as cell warping, achieve the effects of preventing warping, reducing surface stress, improving minority carrier life and conversion efficiency

Pending Publication Date: 2019-11-22
CENTROTHEM PHOTOVOLTAICS AG +1
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Problems solved by technology

[0004] In addition, with the development of solar cell technology, the thickness of crystalline silicon solar cells is also becoming thinner, and the passivation layer prepared on the surface of the silicon wafer is also prone to warping due to the large tensile stress; how to ensure Eliminating this defect based on the passivation effect is also an urgent problem to be faced

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  • Solar cell laminated passivation structure, preparation method thereof and cell
  • Solar cell laminated passivation structure, preparation method thereof and cell
  • Solar cell laminated passivation structure, preparation method thereof and cell

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Embodiment Construction

[0040] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. It is only stated here that the words for directions such as up, down, left, right, front, back, inside, and outside that appear or will appear in the text of the present invention are only based on the accompanying drawings of the present invention, and are not specific to the present invention. limited.

[0041] see figure 1 , the present invention provides a solar cell passivation structure, which includes: a silicon wafer 1 and an aluminum oxide layer 2 sequentially arranged on the back side of the silicon wafer, a mixed passivation layer 3 and a passivation layer 4; wherein the aluminum oxide layer 2 is deposited by PECVD; the mixed passivation layer 3 is formed by bombarding the aluminum oxide layer with a plasma obtained by ionizing a hydrogen-containing mat...

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PUM

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Abstract

The invention discloses a solar cell laminated passivation structure. The laminated passivation structure comprises a silicon wafer, and an aluminum oxide layer, a mixed passivation layer and a passivation layer which are sequentially arranged on the back surface of the silicon wafer, wherein the aluminum oxide layer is formed through a PECVD method; and the mixed passivation layer is formed by bombarding the aluminum oxide layer by plasmas obtained by ionizing a hydrogen-containing material. The invention also discloses a laminated passivation solar cell which comprises the solar cell laminated passivation structure. By implementing the method, dangling bonds on the back surface of the silicon wafer can be effectively removed, the surface state is reduced, and the efficiency of the solarcell is improved.

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to a solar cell stack passivation structure, a preparation method thereof, and a cell. Background technique [0002] In order to improve the efficiency of crystalline silicon solar cells, the surface of the cell must be well passivated to reduce the recombination of surface defects and thus increase the open circuit voltage of the cell. Most of the existing passivation technologies focus on the backside passivation of solar cells, such as high-efficiency solar cell passivation emitter junction rear surface solar cells (PERC) and rear emitter junctions, backside diffused solar cells (PERL) have achieved great success , wherein the photoelectric conversion efficiency of the PERL solar cell has reached 24.7%; the back contact solar cell (IBC) produced by SunPower Company and the heterojunction (Hetero-junctionIntrinsic Thin-layer, HIT) solar cell produced by Sanyo Company, its effi...

Claims

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Application Information

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IPC IPC(8): H01L31/0216H01L31/18C23C16/40C23C16/50C23C16/56
CPCH01L31/02167H01L31/1868C23C16/403C23C16/50C23C16/56Y02E10/50Y02P70/50
Inventor 林纲正赵亮方结彬
Owner CENTROTHEM PHOTOVOLTAICS AG
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