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Electrically controlled mirror and manufacturing method thereof, electrical scanner, laser processing machine

A manufacturing method and reflector technology, applied in manufacturing tools, laser welding equipment, metal processing equipment, etc., can solve problems such as increased laser offset and deteriorated processing accuracy

Active Publication Date: 2021-07-06
MITSUBISHI ELECTRIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, if the operating speed is increased, the twist of the rotor shaft will increase, and positional displacement will occur in the electronically controlled mirror. In addition, if the electrically controlled mirror itself is operated at high speed, the reflection surface of the mirror will be distorted due to deformation. , the offset of laser scanning becomes larger, and the processing accuracy deteriorates

Method used

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  • Electrically controlled mirror and manufacturing method thereof, electrical scanner, laser processing machine
  • Electrically controlled mirror and manufacturing method thereof, electrical scanner, laser processing machine
  • Electrically controlled mirror and manufacturing method thereof, electrical scanner, laser processing machine

Examples

Experimental program
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Effect test

Embodiment approach 1

[0024] figure 1 It is a schematic diagram of the laser processing machine 1 using the galvanic mirror 10 in Embodiment 1 of this invention. like figure 1 As shown, the laser processing machine 1 has a laser oscillator 300 , two galvano scanners 100A and 100B having a galvano mirror 10 , and an fθ lens 400 .

[0025] The laser processing machine 1 irradiates a laser beam 300A from a laser oscillator 300 to a galvano mirror 10 of a galvano scanner 100A. The galvano-scanner 100A swings the galvano-mirror 10 and irradiates the laser beam 300A reflected by the galvano-mirror 10 to the galvano-mirror 10 of the galvano-scanner 100B.

[0026] The galvano mirror 10 of the galvano scanner 100B drives the galvano mirror 10 to reciprocate and rotate, and irradiates the fθ lens 400 with the laser beam 300A reflected by the galvano mirror 10 . The laser beam 300A injected into the fθ lens 400 forms a spot S on the workpiece 200 . The spot S of the laser beam 300A moves two-dimensionally...

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PUM

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Abstract

The electric control mirror (10) has: a mirror portion (10A) having a mirror surface and a rear reinforcement portion (12) joined to the back side of the mirror surface, the mirror portion (10A) is formed of a single crystal SiC wafer, and is formed of a C / SiC material Back reinforcement (12). As a result, the rigidity of the mirror portion is increased, and the thickness of the mirror portion is reduced to reduce the weight of the rear surface reinforcing portion of the mirror portion. Thereby, the resonant frequency of the galvanic mirror is increased, and the galvanic mirror is highly accurate and hardly deflected even when it is moved at a high speed.

Description

technical field [0001] The present invention relates to a galvano mirror used in a galvano scanner for scanning laser beams, a galvano scanner using the galvano mirror, a laser processing machine using the galvano mirror, and a manufacturing method of the galvano mirror. Background technique [0002] In recent years, high integration of substrates mounted on electronic devices has progressed, and higher precision and higher speed of processing machines have been demanded. In a laser processing machine that processes a substrate, a laser beam is scanned by a galvano mirror. A galvano scanner is used for driving the galvano mirror. Therefore, in order to speed up the processing, it is necessary to speed up the driving of the galvano mirror by the galvano scanner. [0003] A conventional galvano scanner has: a stator fixed to a housing; a rotor shaft rotatably supported; and a galvano mirror mounted on the rotor shaft. Then, the rotor shaft including the permanent magnets is...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10B23K26/082B41J2/47G02B5/08G02B26/08H04N1/113
CPCB41J2/47B23K26/082G02B5/08G02B26/08G02B26/10H04N1/113
Inventor 久米将实熊田辉彦伊藤洋平小林广纪
Owner MITSUBISHI ELECTRIC CORP