Compensation method and system of pressure sensor

Abstract

The invention provides a compensation method and system of a pressure sensor. The method comprises the steps of s1, selecting a plurality of set pressure values in the measuring range of a pressure sensor, obtaining the corresponding pressure value sets, each pressure value set comprising different output pressure values under the set temperature value, and the pressure value set corresponding tothe zero pressure value being the zero pressure value set of the pressure sensor; s2, fitting the output pressure values to obtain zero-point correction values of the set temperature values, and performing zero-point correction on the output pressure values in the pressure value groups based on the zero-point correction values; s3, performing quadratic curve fitting on the output pressure value subjected to zero correction to obtain a temperature compensation curve; and s4, performing least square method curve fitting on the temperature compensation curve to obtain a calibration compensation curve of the pressure sensor, and performing calibration compensation on the output pressure value based on the calibration compensation curve. The pressure sensor compensation method and system provided by the invention are high in compensation precision, low in system resource consumption and short in calibration period.

Description

technical field [0001] The invention relates to the technical field of flowmeters, in particular to a compensation method and system for pressure sensors. Background technique [0002] The pressure sensor is the core component of a pressure-type gas mass flow controller (MFC for short), and its output accuracy plays a decisive role in the control accuracy of the pressure-type MFC. There are two main types of pressure sensors: resistive and capacitive. These two types of sensors often have deviations in the output signal of the pressure sensor due to manufacturing material and process problems and have characteristics of drifting with temperature. Therefore, it is necessary to perform temperature compensation on the pressure sensor, including zero temperature compensation, sensitivity temperature compensation, and accuracy calibration at room temperature, to ensure that the pressure sensor can output signals that meet the accuracy requirements within a certain temperature ran...

AI Technical Summary

Problems solved by technology

If the compensation method uses a simple algorithm for analysis, although the calibration period is short, there is a problem of low compensation accuracy; if a complex algorithm is used for analysis, although the compensation accuracy is high, there are problems of large system consumption and large data storage. To obtain the correct mathematical model, it is necessary to collect data at different temperatures, and the amount of data is large, resulting in a long calibration cycle

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