Method for determining number of micro-discharge secondary electrons of dielectric window
A technology for secondary electrons and secondary electron emission, which can be used in complex mathematical operations and other directions, and can solve problems such as large analysis errors and no consideration of the influence of induced charges.
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[0102] This method is suitable for the situation where microdischarge occurs when electromagnetic waves pass through the dielectric window. Here, the secondary electron emission coefficient is 3, E max The dielectric window = 420eV is taken as an example to introduce the realization process of this method. The number of macro particles NN=10 4 , iteration steps M=900, E dc =0.15MV / m, RF field E rf0 0.5, 0.8, 1.5MV / m, f is 1GHz, initial phase θ=0, dielectric window area A=4cm 2 . E.om =2.1eV, N 0 =1, the outgoing energy and angle of electrons satisfy the following probability density function:
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[0104]
[0105] According to the third method above, the change curve of the number of electrons with time is as follows: image 3 As shown, the dynamic change of the DC field leads to the phenomenon of saturation oscillation in the number of space electrons, and the change curve of the DC electric field with time is shown in Figure 4 shown.
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