Material micro/nano-scale magneto-thermal signal detection method based on scanning probe microscope

Abstract

The invention provides a material micro / nano-scale magneto-thermal signal detection method based on a scanning probe microscope. The material micro / nano-scale magneto-thermal signal detection method adopts a scanning probe microscope platform, a probe with electrical conductivity, thermal conductivity and magnetism, and a thermal loop, and comprises the steps of: firstly, detecting surface appearance of a sample in a contact mode, switching on the thermal loop and detecting a thermal signal of the sample; and secondly, detecting a magnetic signal of the sample in a non-contact manner. Comparedwith the method of three times of scanning in the prior art, wherein two of the three times are that the magnetic signal is obtained through non-contact scanning and the thermal signal is obtained through contact scanning in sequence, the material micro / nano-scale magneto-thermal signal detection method is simple and easy to implement, has short detection time, protects the surfaces of the probeand the sample, and avoids the problem that the detection precision is reduced due to sample displacement deviation since the number of scanning times is reduced.

Description

technical field [0001] The invention belongs to the technical field of signal detection, and in particular relates to a scanning probe microscope-based material micro / nano-scale magnetothermal signal detection method. Background technique [0002] At present, the development of information technology and electronics industry has put forward higher requirements on the performance of small / miniature electronic components, and the heat generation of related materials used in electronic devices has become a key factor affecting their performance. Therefore, studying the thermal properties of materials at the micro / nano scale and understanding their thermal properties and other physical properties of materials (such as mechanical properties, magnetic properties, etc.) have become widely concerned issues. [0003] Magnetic materials and related devices play a pivotal role in information technology. For magnetic materials, the heat generation and heat dissipation process of the ma...

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Problems solved by technology

[0011] However, in the above-mentioned detection method, the detection process of the magnetic signal and the thermal signal is separated, so that the probe needs to successively detect the morphology feature, the non-contact detection of the magnetic signal, and the contact detection of the thermal signal. On the one hand, there are cumbersome steps. , long test time, wear of the probe and the sample surface, etc. On the other hand, due to the separation of thermal signal detection, in order to achieve in-situ detection, the probe needs to perform three scanning processes and each scanning path needs to be controlled, which increases the control Difficulty, often cause sample displacement deviation and affect detection accuracy

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