A Scanning Probe Microscope-Based Detection Method for Micro/Nanoscale Magnetocaloric Signals of Materials

Abstract

The invention provides a scanning probe microscope-based material micro / nano-scale magneto-caloric signal detection method, including a scanning probe microscope platform, a probe with conductivity, thermal conductivity and magnetism, and a thermal circuit; first, the contact The surface topography of the sample is detected by the method, and the thermal circuit is closed at the same time to detect the thermal signal of the sample; then, the magnetic signal of the sample is detected by the non-contact method. Compared with the prior art through three scans, two of which are non-contact scanning to obtain magnetic signals and contact scanning to obtain thermal signals, this method is simple and easy, the detection time is shortened, and the probe and the sample surface are protected. At the same time, due to the reduction in the number of scans, the problem of reduced detection accuracy caused by sample displacement deviation is avoided.

Description

technical field [0001] The invention belongs to the technical field of signal detection, and in particular relates to a scanning probe microscope-based material micro / nano-scale magnetothermal signal detection method. Background technique [0002] At present, the development of information technology and electronics industry has put forward higher requirements on the performance of small / miniature electronic components, and the heat generation of related materials used in electronic devices has become a key factor affecting their performance. Therefore, studying the thermal properties of materials at the micro / nano scale and understanding their thermal properties and other physical properties of materials (such as mechanical properties, magnetic properties, etc.) have become widely concerned issues. [0003] Magnetic materials and related devices play a pivotal role in information technology. For magnetic materials, the heat generation and heat dissipation process of the ma...

AI Technical Summary

Problems solved by technology

[0011] However, in the above-mentioned detection method, the detection process of the magnetic signal and the thermal signal is separated, so that the probe needs to successively detect the morphology feature, the non-contact detection of the magnetic signal, and the contact detection of the thermal signal. On the one hand, there are cumbersome steps. , long test time, wear of the probe and the sample surface, etc. On the other hand, due to the separation of thermal signal detection, in order to achieve in-situ detection, the probe needs to perform three scanning processes and each scanning path needs to be controlled, which increases the control Difficulty, often cause sample displacement deviation and affect detection accuracy

Images