A two-dimensional laser spiral cleaning method

Abstract

The invention discloses a two-dimensional laser spiral cleaning method. The laser cleaning system includes two orthogonally deflected digital vibrating mirror motors. On the mirror on the shaft of the digital galvanometer motor, after secondary reflection, the field lens is constrained to focus on the surface stains on the ablation target substrate in a two-dimensional plane; the interface protocol of the two digital galvanometer motors is XY2‑ 100; The two digital vibrating mirror motors are independently controlled. The two-dimensional laser spiral cleaning method of the present invention, for any point in the cleaning area, compared with line-by-line ablation, the laser returns to the vicinity of the point after completing the outer ring according to the spiral filling path, and the point area obtains cooling time, The heat accumulation effect of the laser is weakened; the progressive scanning speed is the speed of a single vibrating mirror motor, and the helical scanning speed is the vector sum of the two motor speeds. Therefore, compared with the progressive scanning method, the laser spiral cleaning effect is more uniform and the cleaning efficiency is higher. high.

Description

technical field [0001] The invention relates to a two-dimensional laser spiral cleaning method, which belongs to the field of two-dimensional laser cleaning. Background technique [0002] Two-dimensional laser cleaning means that the laser scans on a two-dimensional plane through the deflection of the galvanometer motor, and ablates the oil, rust or oxide layer on the surface of the target, so as to achieve the effect of cleaning the surface of the target. Based on the laser cleaning application of the galvanometer motor module, the existing scanning mode is line scanning and then line scanning again, which mainly has problems such as poor cleaning uniformity and low cleaning efficiency. [0003] The poor cleaning uniformity is mainly due to the fact that in the progressive scanning mode of the galvanometer, the laser scans to the line edge area and undergoes a deceleration to reverse acceleration process, while the laser in the non-edge area maintains high-speed deflection....

AI Technical Summary

Problems solved by technology

Based on the laser cleaning application of the galvanometer motor module, the existing scanning mode is line scanning and then line scanning again, which mainly has problems such as poor cleaning uniformity and low cleaning efficiency.

[0003] The poor cleaning uniformity is mainly due to the fact that in the progressive scanning mode of the galvanometer, the laser scans to the line edge area and undergoes a deceleration to reverse acceleration process, while the laser in the non-edge area maintains high-speed deflection

The average speed of laser scanning in the edge area is lower than that in the non-edge area, resulting in a stronger ablation degree in the edge area than in the non-edge area, and uneven distribution of shape height in the ablation area

[0004] The low cleaning efficiency is mainly due to the fact that during the progressive scanning process, the X-axis galvanometer deflects the laser from left to right and then stops deflecting. The Y-axis galvanometer motor starts to deflect the laser to change lines and stop, and then the X-axis galvanometer swings to fill the entire area again and again. During the progressive ablation process, only one axis motor moves at the same time, that is, the laser deflection speed is the speed of the single axis motor, and the slow scanning speed of the motor directly leads to low cleaning efficiency

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